Hostname: page-component-848d4c4894-wzw2p Total loading time: 0 Render date: 2024-05-22T13:10:46.134Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis of Terbia Doped Yttria Stabilized Zirconia Thin Films by Using the Electrostatic Spray Deposition (ESD) Technique

Published online by Cambridge University Press:  15 February 2011

N.H.J. Stelzer ,
A. Goossens  and
J. Schoonman
N.H.J. Stelzer
Affiliation:
Laboratory for Applied Inorganic Chemistry, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands, n.h.j.@stm.tudelft.nl
A. Goossens
Affiliation:
Laboratory for Applied Inorganic Chemistry, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands, n.h.j.@stm.tudelft.nl
J. Schoonman
Affiliation:
Laboratory for Applied Inorganic Chemistry, Delft University of Technology, Julianalaan 136, 2628 BL Delft, The Netherlands, n.h.j.@stm.tudelft.nl
Get access

Abstract

Terbia doped yttria stabilized zirconia (Tb-YSZ) thin films have been deposited on various substrates by applying the electrostatic spray deposition (ESD) technique. Yttrium- and zirconium-acetylacetonate as well as terbium-acetate hydrate were used as precursors. Butyl carbitol-ethanol mixed alcohol's with ratios of 50:50 vol% and 80:20 vol% were used as solvents for precursor solutions with total metal concentrations between 0.09 M and 0.009 M. Tb-YSZ thin films were deposited at temperatures between 520 K and 730 K. Surface morphology, chemistry, and crystal structure were studied using scanning electron microscopy (SEM), energy dispersive X-ray (EDX), and X-ray diffraction (XRD). The Tb-YSZ layers consist of a fully stabilized cubic phases. The surface morphology of deposited Tb-YSZ layers can be controlled by changing different deposition parameters. The adhesion of Tb-YSZ to the substrate can be improved by a high temperature treatment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 453: Symposium R – Solid State Chemistry of Inorganic Materials , 1996 , 543
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Cao, C.Z., J. Appl. Electrochem., 24, 1222 (1994).Google Scholar
2. van Dijk, M.P., de Vries, K.J., and Burggraaf, A.J., Solid State Ionics, 16, 211 (1985).Google Scholar
3. Han, P. and Worrell, W.L., J. Electrochem. Soc., 142, 4235 (1995).Google Scholar
4. Cao, G.-Z., Meijerink, J., Brinkman, H. W., de Vries, K.J., and Burggraaf, A.J., J. Mater. Chem., 3, 773 (1993).Google Scholar
5. van Zomeren, A.A., Kelder, E.M., Marijnissen, J.C.M., and Schoonman, J., J. Aerosol Sci., 25, 1229 (1994).Google Scholar
6. Kelder, E.M., Nijs, O.C.J., and Schoonman, J., Solid State Ionics, 68, 5 (1994).Google Scholar
7. Chen, C.H., Buysman, A.A.J., Kelder, E.M., and Schoonman, J., Solid State Ionics, 80, 1 (1995).Google Scholar
8. Chen, C.H., Kelder, E.M., and Schoonman, J., J. Mater. Sci., 31, 5437 (1996).Google Scholar
9. Chen, C.H., Nord-Varhaug, K., and Schoonman, J., J. Mater. Synthesis and Processing, 4, (3), 189(1996).Google Scholar
10. Siefert, W., Thin Solid Films, 120, 267 (1984).Google Scholar
11. Stubican, V.S., Hink, R.S., and Henry, M., Prog. Solid State Chem., 18, 259 (1988).Google Scholar