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Synthesis and Properties of Crystalline Carbon Nitride Composite Superhard Coatings

Published online by Cambridge University Press:  15 February 2011

Yip-Wah Chung
Yip-Wah Chung*
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, ywchung@nwu.edu
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Abstract

Multilayer carbon nitride/TiN coatings were synthesized using a dual-cathode dc magnetron sputtering system. Fully crystalline films can be obtained when the thickness of the carbon nitride component is on the order of one nm. There appears to be a strong correlation between the occurrence of strong TiN(111) texture and the hardness of these multilayer coatings, as controlled by target powers, nitrogen partial pressure and substrate bias. These coatings can be synthesized at near room temperatures, with smooth surface morphology and hardness in the range of 45–55 GPa.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 227
Copyright
Copyright © Materials Research Society 1996

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