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Switch-On Transients And Static Characteristics Of Polymorphous And Amorphous Silicon Thin-Film Transistor

Published online by Cambridge University Press:  01 February 2011

V. Tripathi  and
Y. N. Mohapatra
V. Tripathi
Affiliation:
Department of Physics, IIT Kanpur-208016, INDIA E-mail:vibha@iitk.ac.in P. Roca i Cabarrocas Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 du CNRS), Ecole Polytechnique, 91128 Palaiseau Cedex, France
Y. N. Mohapatra
Affiliation:
Department of Physics, IIT Kanpur-208016, INDIA E-mail:vibha@iitk.ac.in P. Roca i Cabarrocas Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 du CNRS), Ecole Polytechnique, 91128 Palaiseau Cedex, France
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Abstract

Hydrogenated polymorphous silicon (Pm-Si:H) being an admixture of amorphous and ordered phase silicon shows improved optical and electrical properties due to the presence of nanocrystallites. In order to compare the dynamic and steady state electrical properties in a-Si:H and pm-Si:H, bottom gate Thin Film Transistors (TFT) of these materials were fabricated with SiO2 as the insulating layer. The active materials were deposited using plasma-enhanced chemical vapor deposition (PECVD) by varying pressure, temperature and hydrogen dilution. Transfer characteristics of TFTs made using pm-Si:H show lower leakage current, higher on-current and sharper volt per decade change as compared to similar TFTs made from a-Si:H. Density of states in pm-Si:H as calculated from field effect conductance using incremental method is observed to be an order of magnitude lower than in a-Si:H based devices. To compare dynamic characteristics, we studied the switch-on transient characteristics of polymorphous and amorphous silicon TFTs by pulsing the gate to different voltages in the temperature range of 150-300K. The switch-on transients are trap limited with overall better switching characteristics for pm-Si:H samples. An initial rising transient in case of pm-Si:H is activated with an effective energy of 0.3 eV. The origins of transients are interpreted in terms of trap limited carrier dynamics and charge redistribution within the distribution of localized states.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A18.7
Copyright
Copyright © Materials Research Society 2003

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