Hostname: page-component-84b7d79bbc-g5fl4 Total loading time: 0 Render date: 2024-07-25T21:03:51.656Z Has data issue: false hasContentIssue false
  • English
  • Français

Surfactant-Mediated Si/Ge Epitaxial Crystal Growth

Published online by Cambridge University Press:  03 September 2012

Eunja Kim ,
Chan Wuk OH  and
Young Hee Lee
Chan Wuk OH
Affiliation:
Department of Physics and Semiconductor Physics Research Center, Jeonbuk National University, Jeonju, 561-756, Korea
Young Hee Lee
Affiliation:
Department of Physics and Semiconductor Physics Research Center, Jeonbuk National University, Jeonju, 561-756, Korea
Get access

Abstract

We investigate the kinetic role of a surfactant in the epitaxial Si/Ge crystal growth using ab initio molecular dynamics approach. We examine the previously suggested dimer-exchange mechanisms and find that kinetics plays a crucial role in determining the exchange process. We further find that the diffusion of adatoms on an island in the presence of a surfactant is quite different from the dimer-exchange process on a flat surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 448: Symposium M – Control of Semiconductor Surfaces and Interfaces , 1996 , 135
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Sakamoto, K. et al. , Jpn. J. Appl. Phys. 32, L204 (1993).Google Scholar
2 Copel, M. et al. , Phys. Rev. Lett. 63, 632 (1989).Google Scholar
3 Tromp, R. M. and Reuter, M. C., Phys. Rev. Lett. 68, 954 (1992).Google Scholar
4 Eaglesham, D. J. et al. , Phys. Rev. Lett. 70, 966 (1993).Google Scholar
5 Yu, B. D. and Oshiyama, A., Phys. Rev. Lett. 71, 585 (1993); 72, 3190 (1994).Google Scholar
6 Ohno, T., Phys. Rev. Lett. 73, 460 (1994).Google Scholar
7 Oh, C. W., Kim, E., and Lee, Y. H., Phys. Rev. Lett. 76, 776 (1996).Google Scholar
8 Car, R. and Parrinello, M., Phys. Rev. Lett. 55, 2471 (1985).Google Scholar
9 Kim, E., Oh, C. W., Kim, J. Y., and Lee, Y. H., unpublished.Google Scholar