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Surface smoothing of glass substrate by irradiation of ionic liquid ion beams

Published online by Cambridge University Press:  20 June 2013

Mitsuaki Takeuchi ,
Takuya Hamaguchi ,
Hiromichi Ryuto  and
Gikan H Takaoka
Mitsuaki Takeuchi
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
Takuya Hamaguchi
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
Hiromichi Ryuto
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
Gikan H Takaoka
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Abstract

Surface smoothing of a barium borosilicate glass substrate by irradiation of ionic liquid ion beams were investigated. 1-ethyl-3-methylimidaolium tetrafluoroborate (EMIM-BF4) and 1-butyl-3-methylimidazolium hexafluorophosphate (BMIM-PF6) were used for the source liquid. Surface roughness represented as the arithmetic mean value decreased from 0.17 nm to 0.13 nm by the BMIM-PF6 negative ion beam. Secondary electron microscope (SEM) observation for the glass surface irradiated with the BMIM-PF6 negative ion beam showed a clear image without an electrical charge-up, though the EMIM-BF4 negative ion beam irradiated glass yielded a charged up image. X-ray photoelectron spectroscopy (XPS) analysis implied that the surface layer including cation-anion pair of BMIM-PF6 was deposited by the BMIM-PF6 negative ion beam irradiation, while an insulated surface with barium fluoride was formed by the EMIM-BF4 negative ion beam irradiation.

Keywords

ion-beam processingthin filmion-solid interactions
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1575: Symposium VV – Materials Applications of Ionic Liquids , 2013 , mrss13-1575-vv05-08
Copyright
Copyright © Materials Research Society 2013 

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References

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