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Surface Roughening, Columnar Growth and Intrinsic Stress Formation in Amorphous CuTi Films

Published online by Cambridge University Press:  10 February 2011

U. v. Hulsen ,
P. Thiyagarajan  and
U. Geyer
U. v. Hulsen
Affiliation:
1. Physikalisches Institut and SFB 345, 37073 Göttingen, Germany
P. Thiyagarajan
Affiliation:
Argonne National Laboratory, Argonne, IL 60439, USA
U. Geyer
Affiliation:
1. Physikalisches Institut and SFB 345, 37073 Göttingen, Germany
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Abstract

The growth of amorphous CuTi films, prepared by electron beam evaporation, is investigated by Scanning Tunneling Microscopy (STM), Small Angle Neutron Scattering (SANS) and in situ measurements of intrinsic mechanical stresses (ISM). In early growth stages the films develop compressive stresses and, with increasing film thickness, a crossover to tensile stresses. In the same thickness range the STM investigations show a change in the growth mode. Our experiments suggest a transition from planar growth with statistical surface roughening to columnar growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 391
Copyright
Copyright © Materials Research Society 1997

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