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Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry

Published online by Cambridge University Press:  26 February 2011

P. G. Snyder ,
K. G. Merkel ,
B. N. De ,
J. A. Woollam ,
D. W. Langer ,
C. E. Stutz ,
R. Jones ,
A. K. Rai  and
K. Evans
P. G. Snyder
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
K. G. Merkel
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
B. N. De
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
J. A. Woollam
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
D. W. Langer
Affiliation:
University of Pittsburgh, Pittsburgh, PA 15261;
C. E. Stutz
Affiliation:
Avionics Lab, WPAFB, Dayton, OH 45433;
R. Jones
Affiliation:
Avionics Lab, WPAFB, Dayton, OH 45433;
A. K. Rai
Affiliation:
Universal Energy Systems, Dayton, OH 45432.
K. Evans
Affiliation:
Universal Energy Systems, Dayton, OH 45432.
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Abstract

Variable Angle of incidence Spectroscopic Ellipsometry (VASE) is a sensitive, nondestructive method of determining optical constants, layer thicknesses, alloy compositions and other parameters. We model the VASE data for a sample containing a 20 period Al0 5Ga0 5As-GaAs superlattice, to obtain the effective index of refraction (n) and e tinction coefficient (k) of the superlattice layer. The room temperature VASE spectra contain strong, sharp features at the e-hh(1), e-lh(1) and e-hh(2) excitonic tran-sition energies. In addition, VASE was used to characterize more compli-cated layered structures, which also contained superlattices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 102 , 1987 , 165
Copyright
Copyright © Materials Research Society 1988

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Footnotes

*

Research supported by NASA Lewis Grant NAG-3-154.

References

REFERENCES

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