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Study on Relaxor Ferroelectric Thin Films of Tungsten Bronze Pb1-xBaxNb2O6 by RF Magnetron Sputtering

Published online by Cambridge University Press:  10 February 2011

X. Xiao ,
N. Xu  and
L. Li
X. Xiao
Affiliation:
Department of Materials Science & Engineering, Tsinghua University, Beijing, 100084, China
N. Xu
Affiliation:
Department of Materials Science & Engineering, Tsinghua University, Beijing, 100084, China
L. Li
Affiliation:
Department of Materials Science & Engineering, Tsinghua University, Beijing, 100084, China
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Abstract

Ferroelectric thin films of tungsten bronze lead barium niobáte (PBN) were fabricated by radio frequency magnetron sputtering. Oriented growths of the thin films were observed along (001) in tetragonal phase and along (002) in orthorhombic phase. Excess amount of PbO (6 wt %) in the PBN targets were used to compensate Pb evaporation during sputtering deposition. Ferroelectric properties were investigated as a function of annealing temperatures. The thin film with high quality was annealed at 650 °C, while its remnant polarization (Pr) and coercive field (Ec) were equal to 47.9 μC/cm2 and 5.2 kV/cm, respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 355
Copyright
Copyright © Materials Research Society 1997

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References

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