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A Study of the Surface Texture of Polycrystalline Phosphor Films Using Atomic Force Microscopy

Published online by Cambridge University Press:  15 February 2011

R. Revay ,
J. Schneir ,
D. Brower ,
J. Villarrubia ,
J. Fu ,
J. Cline ,
T. J. Hsieh  and
W. Wong-Ng
R. Revay
Affiliation:
Optex Communications Corporation, Rockville, MD 20850
J. Schneir
Affiliation:
Manufacturing Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
D. Brower
Affiliation:
Optex Communications Corporation, Rockville, MD 20850
J. Villarrubia
Affiliation:
Manufacturing Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
J. Fu
Affiliation:
Manufacturing Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
J. Cline
Affiliation:
Material Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
T. J. Hsieh
Affiliation:
Optex Communications Corporation, Rockville, MD 20850
W. Wong-Ng
Affiliation:
Material Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899
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Abstract

Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of the films is important for evaluating the effect of surface quality on optical scatter. In other thin film material systems it has been found that the surface “bumps” revealed by AFM correspond to grains in the film. This is not the case for the stimulable phosphor films used in our study. We have determined the grain size of our phosphor films by transmission electron microscopy (TEM) and x-ray diffraction (XRD). The grain size from TEM and XRD does not correlate with the size of the AFM surface “bumps.” For example, in two of the five films studied, the XRD derived grain size varies by a factor of two but the size of the surface “bumps” remains the same. We conclude that the texture of the film surface is not directly determined by the grain size of the phosphor material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 119
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1 Hegde, R.I., Chonko, M.A., and Tobin, P.J. in Evolution of Surface and Thin Film Microstructure, edited by Atwater, H.A., Chason, E, Grabow, M.H., and Lagally, M.G. (Mater. Res. Soc. Proc. 280, Pittsburgh, PA, 1993) pp. 103–108.Google Scholar
2 Files-Sesler, L.A., Hogan, T., and Taguchi, T., J. Vac. Sci. Tecnol. A10(4), 2875–2879 (1992).CrossRefGoogle Scholar
3 Digital Instruments Corporation Nanoscope II fitted with a stand-alone head.Google Scholar
4 Certain commercial equipment is identified in this report in order to describe the experimental procedure adequately. Such identification does not imply recommendation or endorsement by NIST, nor does it imply that the equipment identified is necessarily the best available for the purpose.Google Scholar
5 Gallarda, H. and Jain, R., in Integrated Circuit Metrology, Inspection, and Process Control V (SPIE Proceedings 1464, Bellingham, WA 1991) pp.459–473; G.S. Pingali and R. Jain, in Proceedings of IEEE Workshop on Applications of Computer Vision, (Los Alamitos, CA, 1992) pp. 282–289; D.J. Keller and F.S. Franke, Surf. Sci. 294, 409 (1993).Google Scholar
6 “SHADOW”, Materials Data, Incorporated, P.O.Box 791, Livermore, CA94551Google Scholar
7 Williamson, G.K. and Hall, W.H., Advances in X-ray Analysis, 23 (Plenum Press, New York, 1953) pp. 73–81 Google Scholar