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Study of Periodic Surface Nanostructures Using Coherent Grating X-Ray Diffraction (CGXD)

Published online by Cambridge University Press:  15 February 2011

Qun Shen
Qun Shen*
Affiliation:
Cornell High Energy Synchrotron Source (CHESS) and School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA.
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Abstract

It is shown that an x-ray interference phenomenon, Coherent Grating X-ray Diffraction (CGXD), can be used to study lateral nanostructure arrays on crystal surfaces and interfaces. Compared to Fraunhofer grating diffraction of visible light, x-ray grating diffraction contains information not only about geometric profiles of a surface, but also about the internal crystalline structures and lattice strain distributions in grating features. Grating diffraction patterns can also be measured in a white-beam Laue method using highly collimated polychromatic synchrotron radiation. This provides a way for parallel data collection and is useful in in-situ studies of structural evolution of nanostructure arrays.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 469
Copyright
Copyright © Materials Research Society 1996

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