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Study of Pbtio2 Formation Kinetics by an In-Situ Stress Measurement Technique

Published online by Cambridge University Press:  21 February 2011

Chen C. Li  and
Seshu B. Desu
Chen C. Li
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute andState University, Blacksburg, VA 24061
Seshu B. Desu
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute andState University, Blacksburg, VA 24061
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Abstract

The primary objective of this study is to demonstrate an in–situ stress measurement technique for the study of formation kinetics of multicomponent thin films such as PbTiO3. Film stress–temperature and film stress–time plots have been successfully used to monitor the phase formation of PbTiO3 films in a in–situ way. It is believed that the mechanism of this reaction was dominated by grain boundary diffusion of the participating cations. The activation energy of the PbTiO3 phase formation from PbO/TiO2 double layers was estimated to be 108 kcal/mole.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 435
Copyright
Copyright © Materials Research Society 1993

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