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Studies of C60 Films Deposited Using Ionized Cluster Beam Deposition Technique

Published online by Cambridge University Press:  22 February 2011

Zhong-Min Ren ,
Yuan-Cheng Du ,
Zhi-Feng Ying ,
Xia-Xing Xiong ,
Mao-Qi He ,
Yu-Fen Li  and
Fu-Ming Li
Zhong-Min Ren
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
Yuan-Cheng Du
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
Zhi-Feng Ying
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
Xia-Xing Xiong
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
Mao-Qi He
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
Yu-Fen Li
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
Fu-Ming Li
Affiliation:
State key joint laboratory for material modification by laser, ion and electron beams, Department of Physics, Fudan University, Shanghai, 200433, P.R.China
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Abstract

Films (with thicknesses about thousands A) of a new form of carbon allotrope, CIO also known as Fullerenes, are deposited on Si(111) substrates using ionized cluster beam deposition (ICBD) technique at low (65V) accelerating voltage V. X-ray &-20 diffraction (XRD) have been used to investigate the structural properties of C6Ofi lms, indicating hexagonal close-packed structure with strong (002) XRD assignment together with weak (100), (112) and(004) assignments. Raman spectra, X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) are carried out to make detailed studies of the electronic properties of the films and to illustrate differences between CO films and amorphous carbon films which are deposited by ICBD at high accelerating voltage V >400V. Cio soccer-balls are found to be broken into fragments as accelerating field overtakes about 400V, indicated by the results of XPS, Raman spectra, XRD, and UV/visible absorption spectra.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 349: Symposium T – Novel Forms of Carbon II , 1994 , 191
Copyright
Copyright © Materials Research Society 1994

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References

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