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Structure and Properties of TiC, VC and TiC/VC Thin Films Deposited by Pulsed Laser Deposition

Published online by Cambridge University Press:  10 February 2011

J. E. Krzanowski  and
R. E. Leuchtner
J. E. Krzanowski
Affiliation:
Mechanical Engineering Department
R. E. Leuchtner
Affiliation:
Physics Department, University of New Hampshire, Durham, NH 03824
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Abstract

A study has been conducted on the mechanical, tribological and chemical properties of pulsed laser deposited (PLD) TiC, VC and TiCNC thin films. The TiC films were deposited at 375°C and 5 mTorr Ar, while the TiCNC films were deposited from a composite target at 475°C at pressures of base vacuum and 50 mTorr Ar. XRD analysis revealed the films had the expected B1 structure, although XPS analysis showed a significant oxygen content. Tribological studies were conducted using a ball-on-disk test, and the wear behavior depended on the surface condition and film composition. One TiCNC film exhibited little wear but caused significant ball wear, indicating mixed carbide films are promising candidates for wear-resistant coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 410: Symposium S – Covalent Ceramics III-Science and Technology of Non-Oxides , 1995 , 301
Copyright
Copyright © Materials Research Society 1996

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References

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