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Structural Stability Diagrams for Thin-Film Multilayers

Published online by Cambridge University Press:  10 February 2011

S. A. Dregia ,
R. Banerjee  and
H. L. Fraser
S. A. Dregia
Affiliation:
Department of Materials Science and Engineering, Ohio State University, Columbus, OH 43210
R. Banerjee
Affiliation:
Department of Materials Science and Engineering, Ohio State University, Columbus, OH 43210
H. L. Fraser
Affiliation:
Department of Materials Science and Engineering, Ohio State University, Columbus, OH 43210
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Abstract

Structural stability in thin-film multilayers is described in terms of classical thermodynamics, involving the competition between bulk and interfacial energies. A new type of phase diagram is introduced, the biphase diagram, in which concurrent phase stabilities are mapped as a function of two degrees of freedom, corresponding to two independent layer thicknesses in a periodic multilayer. The model is used to explain our observations of phase stabilities in Al/Ti multilayers, as a function of varying layer thicknesses. The model is also applied to explain the experimental observations made by other investigators on phase stability in Co/Cr thin-film multilayers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 481: Symposium P – Science and Technology of Semiconductor Surface Preparation , 1997 , 545
Copyright
Copyright © Materials Research Society 1998

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References

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