Hostname: page-component-84b7d79bbc-g78kv Total loading time: 0 Render date: 2024-07-29T21:35:15.257Z Has data issue: false hasContentIssue false
  • English
  • Français

Structural Investigation of the Silver—Polyimide Interface by Cross—Sectional Ten and Ion—Beam Sputtering

Published online by Cambridge University Press:  25 February 2011

A. Foitzik  and
F. Faupel
F. Faupel
Affiliation:
Universität Göttingen, Institut für Metallphysik, Hospitalstraβe 3–5, D–3400 Göttingen., Federal Republic of Germany
Get access

Abstract

When metals are deposited on polymers at low rates and elevated temperatures extended and non—uniform interfaces may form, the structural investigation of which requiresspecial techniques. In this paper the morphology of the silver—PMDA—ODA boundary formed during vapor deposition of the metal at 360 ºC has been investigated by means of cross—section TEM and a radiotracer technique in combination with ion—beam sputtering (IBS) for depth profiling. Ag was found to form clusters at the interface, but nearly spherical Ag particles up to diameters as large as 28 nm were also observed within the bulk of the polymer. The formation of Ag clusters is also reflected in the depth profiles, which, in addition, provide direct evidence for the diffusion o; singel Ag atoms deep into the polyimide. Diffusivities in the range of 10–21 – 10–18 m/s were determined for 300 ºC< T < 400 ºC. The Arrhenius plot is curved in accordance with a free—volume mechanism of diffusion. Cross—sectional TEM and low—energyIBS—depth profiling turned out to be an ideal combination for the investigation of extended metal—polymer interfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 203: Symposium D – Electronic Packaging Materials Science V , 1990 , 59
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Ho, P. S., Haight, R., White, R. C., Silverman, B. D., and Faupel, F., in Adhesion of Polymers, ed. by Lee, H. Y. (Plenum, New York, 1990) p. 383.Google Scholar
2. Chou, N. J., Tang, C. H., J. Vac. Sci. Technol. A2, 751 (1984).Google Scholar
3. White, R. C., Haight, R.. Silverman, B. D., and Ho, P. S., Appi. Phys. Lett. 51, 48, (1987).Google Scholar
4. Bartha, J. W., Hahn, P. O., LeGoues, F. K. Ho, P. S., J. Vac. Sci. Technol. A3, 1390, (1985).Google Scholar
5. Grunze, H., Unertl, W. N., Gnanarajan, S., and French, J., Proc. Hater. Res. Soc. Symp. 108, 189, (1988)Google Scholar
6. Kim, Y. H., Walker, G. F., Kim, J., Park, J., J. Adhesion Sci. Technol. 1, 331, (1987).Google Scholar
7. Tromp, R. H., LeGoues, F. K., Ho, P. S., J. Vac. Sci. Technol. A3, 782, (1985).Google Scholar
8. Ohuchi, F. S., Freilich, S. C., J. Vac. Scd. Technol, A4, 1039, (1986).Google Scholar
9. Shanker, K., MacDonald, J. R.. J. Vac. Sci. Technol. A5, 2894 (1987).Google Scholar
10. Faupel, F., Gupta, D., Silverman, B. D., and Ho, P. S., Appl. Phys. Lett. 55, 357, (1989).Google Scholar
11. Faupel, F., Gupta, D., Silverman, B. D., and Ho, P. S., Proc. Europ. Conf. Adv. Mater. Processes, Aachen 1989, Deutsche Gesellschaft f. Materialkunde, Oberursel, p 887 (1990).Google Scholar
12. Faupel, F.. Adv. Hater. 2, 266, (1990).Google Scholar
13. Faupel, F., Proc. Haftung bei Verbundwerkstoffen und Werkstoffverbunden, Konstanz 1990, Deutsche Gesellschaft f. Materialkunde, Oberursel (1990), in press.Google Scholar
14. Foitzik, A. and Faupel, F., submitted to J. Mater. Res.Google Scholar
15. Willecke, R. and Faupel, F., unpublishedGoogle Scholar
16. LeGoues, F. K., Silverman, B. D., and Ho, P. S., J. Vac. Sci. Technol. A6. 2200 (1988)Google Scholar
17. Silverman, B. D., submitted to MacromoleculesGoogle Scholar