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Stress in Ag/Ni Multilayers: A Comparison of Specimen-Curvature and X-Ray Diffraction Methods

Published online by Cambridge University Press:  10 February 2011

P. Gergaud ,
S. Labat ,
H. Yang ,
A. Bottger ,
P. SandstrÖm ,
Erik Svedberg ,
E.J. Mittemeijer ,
J.E. Sundgren  and
O. Thomas
P. Gergaud
Affiliation:
MATOP, URA CNRS 1530, Faculté de St Jérôme, F-13397 Marseille Cedex 20.
S. Labat
Affiliation:
MATOP, URA CNRS 1530, Faculté de St Jérôme, F-13397 Marseille Cedex 20.
H. Yang
Affiliation:
Delft University of Technology, Laboratory for Materials Science, Rotterdamseweg 137, 2628 AL Delft, The Netherlands
A. Bottger
Affiliation:
Delft University of Technology, Laboratory for Materials Science, Rotterdamseweg 137, 2628 AL Delft, The Netherlands
P. SandstrÖm
Affiliation:
Linkoping University, IFM; Department of Physics, S-581 83 Linkoping, Sweden
Erik Svedberg
Affiliation:
Linkoping University, IFM; Department of Physics, S-581 83 Linkoping, Sweden
E.J. Mittemeijer
Affiliation:
Delft University of Technology, Laboratory for Materials Science, Rotterdamseweg 137, 2628 AL Delft, The Netherlands
J.E. Sundgren
Affiliation:
Linkoping University, IFM; Department of Physics, S-581 83 Linkoping, Sweden
O. Thomas
Affiliation:
MATOP, URA CNRS 1530, Faculté de St Jérôme, F-13397 Marseille Cedex 20.
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Abstract

Multilayers and superlattices are of great industrial interest because of their specific properties (magnetic, electronic, tribological…). Multilayers stacking are often in a very high state of intrinsic stress (some GPa) and for reliable integrated devices to be made it is capital to control and understand these intrinsic as well as extrinsic stresses. The objective of the present work is therefore the understanding of the origin of stresses and strains in multilayered metallic materials. Of course, a comparison of the different techniques which can be used for stress determination is a necessary first step of this study. In this aim, we have studied Ag/Ni multilayers, Ag and Ni thin films and Ag/Ni bilayers obtained by sputtering. The stresses have been determined via curvature measurement using both a laser scanning method and X-ray diffraction rocking curves technique, and via X-ray diffraction measurement of several d-spacings which act as in-situ strain gauges (also called the sin2ψ method and related methods). The obtained results from these different techniques are discussed in terms of accuracy, reproducibility and advantages / drawbacks. The obtained stresses from these methods cannot be directly compared and a specific discussion is developed around the relation between the measured strains and stresses and the microstructure of the materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 299
Copyright
Copyright © Materials Research Society 1997

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References

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