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Spectroscopic Investigations of Laser Ablated Germanium Oxide

Published online by Cambridge University Press:  22 February 2011

Paul J. Wolf ,
Brian M. Patterson  and
Sarath Witanachchi
Paul J. Wolf
Affiliation:
Frank J. Seiler Research Laboratory, Materials Physics Division, USAF Academy, CO 80840
Brian M. Patterson
Affiliation:
Frank J. Seiler Research Laboratory, Materials Physics Division, USAF Academy, CO 80840
Sarath Witanachchi
Affiliation:
Department of Physics, University of South Florida, Tampa, FL 33620
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Abstract

Laser produced plumes from a GeO2 target were investigated using both optical emission spectroscopy and laser induced fluorescence. Elemental neutral and ionic Ge and diatomic GeO were monitored as a function of O2 pressure at 4 cm from the target surface. Data obtained from laser fluorescence experiments showed no indication of chemical production of GeO in these plumes under any conditions studied; however, the atomic emission intensities of several ionic and neutral Ge lines appeared to increase with O2 pressure. This signified plume interactions with the background gas. The trends in the species concentrations were determined and the results are interpreted with respect to mechanisms for thin film growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 347
Copyright
Copyright © Materials Research Society 1994

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References

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