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SOI Technologies: Device Applications and Future Prospects

Published online by Cambridge University Press:  25 February 2011

B-Y. Tsaur
B-Y. Tsaur*
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173-0073
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Abstract

Silicon-on-insulator (SOI) technologies have four major applications: very-large-scale integrated circuits (ICs), high-voltage ICs, large-area ICs, and vertical ICs. This paper will review the recent progress made in these areas and discuss the prospects of various SOI technologies for achieving commercialization.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 35: Symposium A – Energy Beam-Solid Interactions and Transient Thermal Processing/1984 , 1984 , 641
Copyright
Copyright © Materials Research Society 1995

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References

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