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Simulation of Dry Etching Processes for III-V Compounds Technology Applications
Published online by Cambridge University Press: 22 February 2011
Abstract
This work introduces a new dry etching simulation technique of the sputtering component of Reactive Ion Etching (R.I.E.) and presents experimental verifications for GaAs. The final objective is to correlate the etch rate to the plasma reactor parameters, which can be incorporated into a computer-simulation program.
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- Copyright © Materials Research Society 1994
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