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A Simple Method for Determination of the Elastic Modulus of Thin Films on a Substrate

Published online by Cambridge University Press:  15 February 2011

M.V. Swain  and
E.R. Weppelmann
M.V. Swain
Affiliation:
CSIRO Division of Applied Physics, Lindfield NSW 2070, Australia.
E.R. Weppelmann
Affiliation:
CSIRO Division of Applied Physics, Lindfield NSW 2070, Australia.
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Abstract

High precision force displacement indenting instruments are now widely used for the determination of the mechanical properties of materials. However, for thin films attached to a substrate, the basis of any analysis of such high precision data is still limited. In this study the force displacement data has been generated using spherically tipped indenters of radii from 5 to 150 μm loaded onto a 2.74 μm thick TiN film on a silicon substrate as well as onto the substrate directly. Data have been generated using two loading procedures, continuous and load partial-unloading, almost entirely within the elastic contact regime. The results are analysed to determine the modulus of the TiN film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 177
Copyright
Copyright © Materials Research Society 1993

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References

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