Hostname: page-component-7479d7b7d-68ccn Total loading time: 0 Render date: 2024-07-12T08:54:46.656Z Has data issue: false hasContentIssue false
  • English
  • Français

Silicon Platform for Mid-infrared Optofluidic Sensors

Published online by Cambridge University Press:  13 March 2013

Pao Lin ,
Hao-Yu Greg Lin ,
Vivek Singh ,
Neil Sunil Patel ,
Lionel Kimerling  and
Anuradha Murthy Agarwal
Pao Lin
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Hao-Yu Greg Lin
Affiliation:
Harvard University, Cambridge, Massachusetts, USA.
Vivek Singh
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Neil Sunil Patel
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Lionel Kimerling
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Anuradha Murthy Agarwal
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Get access

Abstract

Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.

Keywords

Sisensoroptical
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1510: Symposium DD – Group IV Semiconductor Nanostructures and Applications , 2013 , mrsf12-1510-dd14-02
Copyright
Copyright © Materials Research Society 2013

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Fan, X., White, I. M., Nat. Photonics 2011, 5, 591.CrossRefGoogle Scholar
Monat, C., Domachuk, P., Eggleton, B. J., Nat. Photonics 2007, 1, 106.CrossRefGoogle Scholar
Lee, K.-L., Wei, P.-K., Small 2010, 6, 1900.CrossRefGoogle Scholar
Prudenzano, F., Mescia, L., Allegretti, L. A., Calò, G., D’Orazio, A., De Sario, M., Palmisano, T., Petruzzelli, V., Opt. Quant. Electron. 2009, 41, 55.CrossRefGoogle Scholar
Wu, H.-Y., Choi, C. J., Cunningham, B. T., Small 2012, 8, 2769.CrossRefGoogle ScholarPubMed
Hu, Z., Glidle, A., Ironside, C. N., Sorel, M., Strain, M. J., Cooper, J., Yin, H., Lab Chip 2012, 12, 2850.CrossRefGoogle Scholar
Yebo, N. A., Lommens, P., Hens, Z., Baets, R., Opt. Express 2010, 18, 11859.CrossRefGoogle Scholar
Sun, Y., Fan, X., Anal. Bioanal. Chem. 2011, 399, 205.CrossRefGoogle Scholar
Maxa, J.-J., Chapados, C., J. Chem. Phys. 2009, 130, 124513.CrossRefGoogle Scholar
Http://webbook.nist.gov/chemistry/ Google Scholar