Hostname: page-component-76fb5796d-vfjqv Total loading time: 0 Render date: 2024-04-28T05:45:45.985Z Has data issue: false hasContentIssue false

Schottky Barrier Heights of Tantalum Oxide, Barium Strontium Titanate, Lead Zirconate Titanate and Strontium Bismuth Tantalate

Published online by Cambridge University Press:  10 February 2011

J Robertson
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
C W Chen
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
Get access

Abstract

Schottky barrier heights of various metals on tantalum pentoxide, barium strontium titanate, lead zirconate-titanate and strontium bismuth tantalate have been calculated as a function of metal work function. These oxides have a dimensionless Schottky barrier pinning factor, S, of 0.28 – 0.4 and not close to 1, because S is controlled by the Ti-O type bonds not Sr-O type bonds, as assumed previously. Band offsets on silicon are asymmetric with much smaller offset at the conduction band, so that Ta2O5 and barium strontium titanate (BST) are relatively poor barriers to electrons on Si.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Kwon, K W, Kang, C S, Park, S O, Kang, H K, Ahn, S T, IEEE Trans ED 43 919 (1996)Google Scholar
2. Matsui, Y et al. , IEEE ED Lett 17 431 (1996)Google Scholar
3. Alers, G B, Fleming, R M, Wong, Y H, Dennis, B, Pinczuk, A, Redinbo, G, Urdahl, R, Ong, E, Hasan, Z, App Phys Lett 72 1308 (1998)Google Scholar
4. Ezhilvalavan, S, Tseng, T Y, J App Phys 83 4797 (1998)Google Scholar
5. Dietz, G W, Antpohler, W, Klee, M, Waser, R, J App Phys 78 6113 (1995)Google Scholar
6. Dietz, G W, Schumacher, M, Waser, R, Streiffer, S K, Basceri, C, Kingon, A I, J App Phys 82 2359 (1997)Google Scholar
7. Scott, J F, Ann Rev Mats Sci 28 79 (1998)Google Scholar
8. Sudhama, C, Campbell, A C Maniar, P D, Jones, R E, Mogab, C J, J App Phys 75 1014(1994)Google Scholar
9. Paz de Araujo, C A, Cuchiaro, J D, McMillan, L D, Scott, M C, Scott, J F, Nature 374 627 (1995)Google Scholar
10. Di, X, Chen, I W, App Phys Lett 72 1923 (1998)Google Scholar
11. Cowley, A W, Sze, S M, J App Phys 36 3212 (1965)Google Scholar
12. Rhoderick, E H, Williams, R H, Metal Semiconductor Contacts', (Oxford, 1988)Google Scholar
13. Spicer, W E, Lindau, I, Skeath, P, Su, C Y, Chye, P, Phys Rev Lett 44 420 (1980)Google Scholar
14. Brillson, L J, Surface Sci 299 909 (1994)Google Scholar
15. Monch, W, Phys Rev Lett 58 1260 (1986); Surface Sci 299 928 (1994)Google Scholar
16. Tersoff, J Phys Rev Lett 52 465 (1984); 56 2755 (1986)Google Scholar
17. Kurtin, S, McGill, T C, Mead, C A, Phys Rev Lett 30 1433 (1969)Google Scholar
18. Schluter, M, Phys Rev B 17 5044 (1978); Thin Solid Films 93 3 (1982)Google Scholar
19. Monch, W, App Surface Sci 92 367 (1996)Google Scholar
20. Tersoff, J, Phys Rev B 30 4874 (1984)Google Scholar
21. Cardona, M, Christensen, N E, Phys Rev B 35 6182 (1987)Google Scholar
22. Monch, W, J App Phys 80 5076 (1996)Google Scholar
23. Yu, E T, McCaldin, J O, McGill, T C, Solid State Physics 46 1 (1992)Google Scholar
24. Robertson, J, Warren, W L, Tuttle, B A, Diimos, D, Smyth, D M, App Phys Lett 63 1519 (1993)Google Scholar
25. Robertson, J, Chen, C W, Warren, W L, Gutleben, C D, App Phys Lett 69 1704 (1996)Google Scholar
26. Robertson, J, Chen, C W, Warren, W L, Mat Res Soc Symp Proc 493 249 (1998)Google Scholar
27. Mattheis, L F, Phys Rev B 6 4718 (1973)Google Scholar
28. King-Smith, R D., Vanderbilt, D., Phys Rev B 49 5828 (1994)Google Scholar
29. Scott, J F, Ferroelectrics Review 11 (1998)Google Scholar
30. Hartmann, A J, Lamb, R M, Scott, J F, Johnston, P N, ElBouanani, M, Chen, C W, Robertson, J, Korean, J Phys Soc 32 S1329 (1998)Google Scholar
31. Neville, R C, Mead, C A, J App Phys 43 4657 (1972)Google Scholar
32. Hasegawa, H, Nishino, T, J App Phys 69 1501 (1991)Google Scholar
33. Abe, K, Komatsu, S, Jpn J App Phys 31 2985 (1992 Google Scholar
34. Shimizu, T, Gotoh, N, Shinozaki, N, Okushi, H, App Surf Sci 117 400 (1997)Google Scholar
35. Copel, M, Duncombe, P R, Neumayer, D A, Shaw, T M, Tromp, R M, App Phys Lett 70 3227 (1997)Google Scholar
36. Dey, S K, Lee, J J, Alluri, P, Jpn J App Phys 34 3134 (1995)Google Scholar
37. Gutleben, C D, App Phys Lett 71 3444 (1997)Google Scholar
38. Robertson, J, Warren, W L, Mat Res Soc Symp Proc 361 123 (1995)Google Scholar
39. Oehrlein, G S, J App Phys 55 3715 (1984)Google Scholar