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Roughening by Ion Bombardment: A Stochastic Continuum Equation

Published online by Cambridge University Press:  03 September 2012

R. Cuerno  and
A.-L. Barabasi
R. Cuerno
Affiliation:
Center for Polymer Studies and Dept. of Physics, Boston University, Boston, MA 02215
A.-L. Barabasi
Affiliation:
IBM T. J. Watson Research Center, P.O. Box 218, Yorktown Heigths, NY 10598
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Abstract

In the context of linear cascade theory, we derive a stochastic nonlinear equation to describe the evolution and scaling properties of surfaces eroded by ion bombardment. The coefficients appearing in the equation are calculated explicitly in terms of the physical parameters characterizing the sputtering process. We find that transitions may take place between various scaling behaviors when experimental parameters such as the angle of incidence of the incoming ions or their average penetration depth, are varied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 367: Symposium P – Fractal Aspects of Materials , 1994 , 299
Copyright
Copyright © Materials Research Society 1995

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