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Rf Magnetron Sputter-Deposition of La0.5Sr0.5CoO3//Pt Composite Electrodes for Pb(Zr, Ti)O3 Thin Film Capacitors

Published online by Cambridge University Press:  10 February 2011

M. V. Raymond ,
H. N. Al-Shareef ,
B. A. Tuttle ,
D. DiMos  and
J. T. Evans
M. V. Raymond
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
H. N. Al-Shareef
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
B. A. Tuttle
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
D. DiMos
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. T. Evans
Affiliation:
Radiant Technologies, Inc. Albuquerque, NM 87106
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Abstract

La0.5Sr0.5CoO3 (LSCO) thin films have been deposited using RF magnetron sputterdeposition for use as an electrode material for Pb(Zr, Ti)O3 (PZT) thin film capacitors. The effect of the O2:Ar sputter gas ratio during deposition, on the LSCO film properties was investigated. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O2:Ar ratio was increased for both the as-deposited and annealed films. In addition, it was found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 145
Copyright
Copyright © Materials Research Society 1996

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