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Residual Ion Implantation Damage at Source/Drain Junctions of Excimer Laser Annealed Polycrystalline Silicon Thin Film Transistor

Published online by Cambridge University Press:  01 February 2011

Kee-Chan Park
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Jae-Shin Kim
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Woo-Jin Nam
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Min-Koo Han
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
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Abstract

Residual ion implantation damage at source/drain junctions of excimer laser annealed polycrystalline silicon (poly-Si) thin film transistor (TFT) was investigated by high-resolution transmission electron microscopy (HR-TEM). Cross-sectional TEM observation showed that XeCl excimer laser (λ=308 nm) energy decreased considerably at the source/drain junctions of top-gated poly-Si TFT due to laser beam diffraction at the gate electrode edges and that the silicon layer amorphized by ion implantation, was not completely annealed at the juncions. The HR-TEM observation showed severe lattice disorder at the junctions of poly-Si TFT.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

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References

1. Mimura, A., Ohwada, J.I., Hosokawa, Y., Suzuki, T. Kawakami, H. and Miyata, K., IEEE Trans. Elec. Dev. 35, 418 (1988).Google Scholar
2. Lee, J.Y., Han, C.H. and Kim, C.K., IEEE Electron Device Lett. 15, 301 (1994).Google Scholar
3. Rohlfing, F.W., Ayres, J.R., Brotherton, S.D., Fisher, C.A., McCulloch, D.J., International Display Research Conference, 119122 (2000).Google Scholar
4. Moller, K.D., OPTICS, (University Science Books, Mill Valley, CA, 1988) p. 172.Google Scholar