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Quenched-in Defects in CW Laser Irradiated Virgin Silicon.
Published online by Cambridge University Press: 15 February 2011
Abstract
Quenched-in defects in cw laser irradiated silicon have been identified using deep level transient spectroscopy. Four among the five dominant defect states arise from transition metal impurities (iron, chromium) present in precipitates in the as-grown material and dispersed into the crystal upon heat treatment. Native defects are involved in the form of phosphorous-vacancy complexes, which account for the remaining level.
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- Copyright © Materials Research Society 1982
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