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Quantitative Studies of Long-term Stable, Top-down Fabricated Silicon Nanowire pH Sensor

Published online by Cambridge University Press:  26 January 2011

Sun Choi  and
Albert P. Pisano
Sun Choi
Affiliation:
Berkeley Sensor and Actuator Center (BSAC)
Albert P. Pisano
Affiliation:
Berkeley Sensor and Actuator Center (BSAC)
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Abstract

We report simple and effective methods to develop long-term, stable silicon nanowire-based pH sensors and systematic studies of the performance of the developed sensors. In this work, we fabricate silicon nanowire pH sensors based on top-down fabrication processes such as E-beam lithography and conventional photolithography. In order to improve the stability of the sensor performance, the sensors are coated with a passivation layer (silicon nitride) for effective electrical insulation and ion-blocking. The stability, the pH sensitivity, and the repeatability of the sensor response are critically analyzed with regard to the physics of sensing interface between sample liquid and the sensing surface. The studies verify that the sensor with a passivation layer over critical thickness show long-term, stable sensor response without long-term drift. The studies also show the detection of pH level with silicon nanowire sensors is repeatable only after proper rinsing of sensor surfaces and there exists trade-off between the stability and the pH sensitivity of sensor response.

Keywords

devicesdiffusionelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1303: Symposium Y – Nanomaterials Integration for Electronics, Energy and Sensing , 2011 , mrsf10-1303-y09-06
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

[1] Park, I., Li, Z., Li, X., Pisano, A.P., Williams, R.S., Towards the silicon nanowire-based sensor for intracellular biochemical detection, Biosens. Bioelectron., 22 (2007) 2065–2070.Google Scholar
[2] Canham, L.T., Nanoscale semiconducting silicon as a nutritional food additive, Nanotechnology, 18 (2007) 185704.Google Scholar
[3] Patolsky, F., Zheng, G., Lieber, C.M., Nanowire-Based Biosensors, Anal. Chem., 78 (2006) 4260–4269.Google Scholar
[4] Wang, W.U., Chen, C., Lin, K.H., F. Y., , Lieber, C.M., Label-free detection of small-molecule–protein interactions by using nanowire nanosensors, Proc. Natl Acad. Sci. U.S.A., 102 (2005) 3208.Google Scholar
[5] Li, Z., Rajendran, B., Kamins, T.I., Li, X., Chen, Y., Williams, R.S., Silicon nanowires for sequence-specific DNA sensing: device fabrication and simulation, Appl. Phys. A, 80 (2005) 1257–1263.Google Scholar
[6] Zheng, G., Lu, W., Jin, S., Lieber, C.M., Synthesis and Fabrication of High-Performance n-Type Silicon Nanowire Transistors, Adv. Mater., 16 (2004) 1890–1893.Google Scholar
[7] Li, Z., Chen, Y., Li, X., Kamins, T.I., Nauka, K., Williams, R.S., Sequence-Specific Label-Free DNA Sensors Based on Silicon Nanowires, Nano Lett., 4 (2004) 245–247.Google Scholar
[8] Cui, Y., Wei, Q.Q., P. H., , Lieber, C.M., Functional Nanoscale Electronic Devices Assembled Using Silicon Nanowire Building Blocks, Science, 291 (2001) 851.Google Scholar
[9] Park, I., Li, Z., Pisano, A.P., Williams, R.S., Top-down fabricated silicon nanowire sensors for real-time chemical detection, Nanotechnology, 21 (2010) 015501.Google Scholar