Hostname: page-component-84b7d79bbc-7nlkj Total loading time: 0 Render date: 2024-07-31T19:06:05.355Z Has data issue: false hasContentIssue false
  • English
  • Français

Quantitative Measurement of the Effect of Annealing on the Adhesion of Thin Copper Films Using Superlayers

Published online by Cambridge University Press:  10 February 2011

M. D. Kriese ,
N. R. Moody  and
W. W. Gerberich
M. D. Kriese
Affiliation:
Dept of Chemical Engineering & Materials Science, University of Minnesota, Minneapolis
N. R. Moody
Affiliation:
Sandia National Laboratories, Livermore, CA
W. W. Gerberich
Affiliation:
Dept of Chemical Engineering & Materials Science, University of Minnesota, Minneapolis
Get access

Abstract

Nanoindentation at loads from 100 to 750 mN was used to measure the interfacial adhesion energy of sputtered copper thin-films, for which the release of elastic strain energy drives delamination. The as-sputtered films were of four thicknesses, nominally 225 nm, 400 rn, 600 nm and 1000 nm, and were deposited onto Si/SiO2 wafers; one wafer of each two-wafer run was annealed at 600°C for 2 hrs in a nitrogen atmosphere. Subsequently, a nominally 700 nm thick sputtered superlayer of tungsten was deposited over all wafers. The tungsten overlayer was used to promote delamination at the copper-SiO2 interface. The energies for fracture ranged from 1 to 80 J/m2, increasing with increased indentation depth, and a trend of higher adhesion energy for annealed films. The large values of adhesion energy with respect to the thermodynamic work of adhesion are attributed primarily to plasticity and/or void nucleation within the copper film, which appears to be strongly influenced by the constraint of an overlayer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 363
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Evans, A.G., Drory, M.D. and Hu, M.S., J. Mater. Res. 3, 1043 (1988).Google Scholar
2.Rice, J.R., J. Appl. Mech. 55, 98 (1988).Google Scholar
3.Evans, A.G., Riuhle, M., Dalgleish, B.J. and Charalambides, P.G., Mater. Sci. & Eng. A126, 53 (1990).Google Scholar
4.Hutchinson, J.W., Thouless, M.D. and Liniger, E.G., Acta metall. 40, 295 (1992).Google Scholar
5.Thouless, M.D., Hutchinson, J.W. and Liniger, E.G., Acta metall. 40, 2639 (1992).Google Scholar
6.Evans, A.G. and Dalgleish, B.J., Mater. Sci. & Eng. A162, 1 (1993).Google Scholar
7.Suo, Z. and Hutchinson, J.W., Int. J. of Frac. 43, 1 (1990).Google Scholar
8.Venkataraman, S.K. et al., J. Adhesion Sci. Tech. 7, 1279 (1993).Google Scholar
9.deBoer, M.P. and Gerberich, W.W., Acta metall. 44, 3169 (1996).Google Scholar
10.deBoer, M.P. and Gerberich, W.W., Acta metall. 44, 3177 (1996).Google Scholar
11.Marshall, D.B. and Evans, A.G., J. Appl. Phys. 56, 2632 (1984).Google Scholar
12.Hutchinson, J.W. and Suo, Z., Advances in Applied Mechanics 29, 63 (1992).Google Scholar
13.Kriese, M.D., Boismier, D.A., Moody, N.R. and Gerberich, W.W., Eng. Frac. Mech., to be published (1997).Google Scholar
14.Bagchi, A., Lucas, G.E., Suo, Z. and Evans, A.G., J. Mater. Res. 9, 1734 (1994).Google Scholar
15.Kriese, M.D., Moody, N.R. and Gerberich, W.W., in Symposium on Materials Reliability in Microelectronics VII, edited by Clement, J., Keller, R. B., Krisch, K., Sanchez, J. and Suo, Z. (Materials Research Society 473, San Francisco, 1997), pp. 39–49.Google Scholar
16.Evans, A.G. and Hutchinson, J.W., Int. J. Sol. Struc. 20, 455 (1984).Google Scholar
17.Rosenfield, L.G., Ritter, J.E., Lardner, T.J. and Lin, M.R., J. Appl. Phys. 67, 3291 (1990).Google Scholar
18.Bahr, D.F., Hoehn, J.W., Moody, N.R. and Gerberich, W.W., submitted to Acta Materialia, (1997).Google Scholar
19.Wu, T.W., J. Mater. Res. 6, 407 (1991).Google Scholar
20.Shih, C.F. and Asaro, R.J., J. Appl. Mech. 55, 299 (1988).Google Scholar
21.Tvergaard, V. and Hutchinson, J.W., J. of Mech. Phys. Sol. 41, 1119 (1993).Google Scholar
22.Kriese, M.D., Moody, N.R. and Gerberich, W.W., in Boundaries and Interfaces in Materials: The David A. Smith Symposium, edited by Pond, R. C., Clark, W. A. T. and King, A. H. (TMS, Indianapolis, 1997), to be published.Google Scholar