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Pulsed-Laser Deposition and Characterization of Amorphous Diamondlike Carbon Films

Published online by Cambridge University Press:  22 February 2011

Y. Huai ,
J. N. Broughton ,
E. Gat ,
M. Chaker ,
C. F. M. Borges ,
Y. Beaudoin ,
H. PÉpin  and
M. Moisan
Y. Huai
Affiliation:
lINRS-Énergie et Matéiauz, 1650, montée Ste-Julie, C. P. 1020, Varennes, Québec, CanadaJ3X 1S2
J. N. Broughton
Affiliation:
lINRS-Énergie et Matéiauz, 1650, montée Ste-Julie, C. P. 1020, Varennes, Québec, CanadaJ3X 1S2
M. Chaker
Affiliation:
lINRS-Énergie et Matéiauz, 1650, montée Ste-Julie, C. P. 1020, Varennes, Québec, CanadaJ3X 1S2
C. F. M. Borges
Affiliation:
Département de Physique, Université de Montréal, C.P. 6128, Succ. A, Montrédal, Québec, H3C 3J7
Y. Beaudoin
Affiliation:
lINRS-Énergie et Matéiauz, 1650, montée Ste-Julie, C. P. 1020, Varennes, Québec, CanadaJ3X 1S2
H. PÉpin
Affiliation:
lINRS-Énergie et Matéiauz, 1650, montée Ste-Julie, C. P. 1020, Varennes, Québec, CanadaJ3X 1S2
M. Moisan
Affiliation:
Département de Physique, Université de Montréal, C.P. 6128, Succ. A, Montrédal, Québec, H3C 3J7
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Abstract

Unhydrogenated amorphous carbon films were deposited by KrF pulsed laser ablation of graphite under a laser power density of 8×108 W/cm2. The films were characterized using x-ray reflectivity, optical transmittance, spectroscopic ellipsometry and Raman spectroscopy. The physical, optical and bonding properties of the films have been investigated in detail as functions of substrate temperatures Ts (22-300°C) and post-annealing temperatures. Films deposited at Ts, <200°C possessed diamond-like properties with mass densities p=2.8-3.1 g/cm3 and optical bandgaps Eg,=1.5-2.2 eV. Above Ts,=200°C, the films showed typical graphite characteristics. The diamond-like films annealed at temperatures up to 750°C show excellent thermal stability.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 349: Symposium T – Novel Forms of Carbon II , 1994 , 471
Copyright
Copyright © Materials Research Society 1994

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References

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