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Processing of Stoichiometric and Ti Doped LiNbO3 Films with Preferred Orientation from Metal Alkoxides

Published online by Cambridge University Press:  16 February 2011

S. Hirano ,
K. Kikuta  and
K. Kato
S. Hirano
Affiliation:
Department of Applied Chemistry, Nagoya University, Nagoya 464–01, Japan
K. Kikuta
Affiliation:
Department of Applied Chemistry, Nagoya University, Nagoya 464–01, Japan
K. Kato
Affiliation:
Department of Applied Chemistry, Nagoya University, Nagoya 464–01, Japan
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Abstract

Stoichiometric and Ti-doped LiNbO3 films could be synthesized by the organometallic route. The films were epitaxially crystallized at temperatures around 400°C on sapphire substrates. The reaction control of alkoxides in solvent was found to be very critical for adjusting the stoichiometry and the low temperature crystallization, as well as the crystallization in water vapor stream.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 3
Copyright
Copyright © Materials Research Society 1990

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References

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