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Process Optimization for Piezoelectric Films and Coatings

Published online by Cambridge University Press:  10 February 2011

M. Sayer ,
L. Zou ,
B. Leclerc ,
M. Lukacs ,
T. Olding  and
J. H. Schloss
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, Ont K7L 3N6, Canada
L. Zou
Affiliation:
Department of Physics, Queen's University, Kingston, Ont K7L 3N6, Canada
B. Leclerc
Affiliation:
Department of Physics, Queen's University, Kingston, Ont K7L 3N6, Canada
M. Lukacs
Affiliation:
Department of Physics, Queen's University, Kingston, Ont K7L 3N6, Canada
T. Olding
Affiliation:
Department of Physics, Queen's University, Kingston, Ont K7L 3N6, Canada
J. H. Schloss
Affiliation:
SSI Technologies, Madison, Wis., USA
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Abstract

The dielectric and piezoelectric response of sol gel based films and composite coatings is affected by the choice of process, gel composition, thermal cycle, processing atmosphere and poling conditions. Important general factors for thin films are the crystallization kinetics and the effects of residual carbon, while a new dielectric technique allows poling methods to be evaluated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 391
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

[1] Sedlar, M., Zou, Li and Sayer, M., “Sol Gel Processing of PLZT Films”, Integ. Ferroelectr. 6, 129 (1995)Google Scholar
[2] Yi, G., Wu, Z. and Sayer, M., “Preparationof PZT ThinFilms by Sol Gel Processing: Electrical, Optical and Electro-Optic Properties”, J. Appl. Phys. 64, 2717 (1988)Google Scholar
[3] Kumar, C.V.R., Pascual, R. and Sayer, M. “Crystallization of Sputtered PZT Films by Rapid Thermal Processing”, J. Appl. Phys. 71, 864 (1992)Google Scholar
[4] Barrow, D. A., Petroff, T.E., Tandon, R. and Sayer, M., “Characterization of Thick Lead Zirconate Titanate Films fabricated using a New Sol Gel Based Process”, J. Appl. Phys. 81, 276 (1997)Google Scholar
[5] Yi, G. and Sayer, M., “Sol Gel Processing of Thick PZT Films”, Proc. 8th Int. Conf. on Appl. of Ferroelect. IEEE, 1992 Google Scholar
[6] Lukacs, M., Olding, T., Sayer, M. and Sherrit, S., “Thickness Mode Resonance of PZT Coatings on a Substrate, Proc. Mat. Res. Sympos. Boston 1997 Google Scholar