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Preparation of YBa2Cu4O8 Thin Films by MOCVD

Published online by Cambridge University Press:  26 February 2011

H. Sakai ,
H. Hayashi ,
K. Uehara ,
N. Kubota ,
T. Sugimoto ,
Y. Shiohara  and
S. Tanaka
H. Sakai
Affiliation:
Superconductivity Research Laboratory, 1STEC, 1–10–13 Shinonome, Kotoku, Tokyo 135, Japan
H. Hayashi
Affiliation:
Central Research Laboratory, Kyocera Corporation, 14 Yamashita-cyo, Kokubu-shi, Kagoshima 899–43, Japan
K. Uehara
Affiliation:
Superconductivity Research Laboratory, 1STEC, 1–10–13 Shinonome, Kotoku, Tokyo 135, Japan
N. Kubota
Affiliation:
Superconductivity Research Laboratory, 1STEC, 1–10–13 Shinonome, Kotoku, Tokyo 135, Japan
T. Sugimoto
Affiliation:
Superconductivity Research Laboratory, 1STEC, 1–10–13 Shinonome, Kotoku, Tokyo 135, Japan
Y. Shiohara
Affiliation:
Superconductivity Research Laboratory, 1STEC, 1–10–13 Shinonome, Kotoku, Tokyo 135, Japan
S. Tanaka
Affiliation:
Superconductivity Research Laboratory, 1STEC, 1–10–13 Shinonome, Kotoku, Tokyo 135, Japan
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Abstract

Preparation processing to obtain 124 single phase films has been studied by MOCVD. The YBCO thin films which were fabricated on MgO(100) and SrTiO3(100) substrates, respectively, were obtained under both conditions of Ts(temperature of susceptor)=800°C and Po2(oxygen partial pressure)=17.5torr. It was found that the oriented peaks of 124 c-axis and of 123 a-axis were more prominent than others at the composition ratio(Y/Ba/Cu=l.0/2.7/4.7), using the MgO(100) substrates. The 123 a-axis oriented grain was observed by using SEM and TEM. We have obtained thin films which were dominant in the 124 phase on the SrTiO3(100) substrates. The film surface morphology on the SrTiO3(100) substrate was smoother than that on the MgO(100) substrate. The origin of a-axis oriented grain growth was explained by the surface step(about 10 À) on MgO(100).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 275: Symposium S – Layered Superconductors: Fabrication, Properties and Applications , 1992 , 467
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

[1] Hayashi, H., Sugimoto, T., Kikuchi, K., Yuhya, S., Yamada, Y., Yoshida, M., Sugawara, K. and Shiohara, Y., in Proc. 2nd Intern. Symp. on Superconductivity, Tsukuba,(Springer, Tokyo, 1990), p.431.Google Scholar
[2] Hayashi, H., Yamada, Y., Sugimoto, T., Shiohara, Y. and Tanaka, S., Jpn. J. Appl. Phys. 30, L352(1991).Google Scholar
[3] Hayashi, H., Yamada, Y., Baar, D. J., Sugimoto, T., Sugawara, K., Shiohara, Y. and Tanaka, S., J. Crys. Growth 115, 782 (1991).Google Scholar
[4] Murakami, H., Suga, T., Noda, T., Shiohara, Y. and Tanaka, S., Jpn. J. Appl. Phys. 29, 2751(1990).Google Scholar
[5] Murakami, H., Yaegashi, S., Nishino, J., Shiohara, Y. and Tanaka, S., Jpn. J. Appl. Phys. 29 2715(1990).Google Scholar
[6] Miyatake, T., Yamaguchi, K., Tanaka, T., Gotoh, S., Koshizuka, N. and Tanaka, S., Physica C 541, 160(1988).Google Scholar
[7] Hammond, R. H. and Bormann, R., Physica C 162, 703 (1989).Google Scholar
[8] Takahashi, H., Aoki, Y., Usui, T., Fromknecht, R., Morishita, T. and Tanaka, S., Physica C 381, 175(1991).Google Scholar