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Preparation Of Superhard Functionally Graded Tetrahedral Amorphous Carbon Coatings By Pulsed Laser Deposition

Published online by Cambridge University Press:  10 February 2011

Q. Wei ,
S. Yamolenko ,
J. Sankar ,
A. K. Sharma  and
J. Narayan
Q. Wei
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept of Mechanical Engineering, McNair Hall, North Carolina A&T State University, Greensboro, NC 27411, quiming@ncat.edu
S. Yamolenko
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept of Mechanical Engineering, McNair Hall, North Carolina A&T State University, Greensboro, NC 27411, quiming@ncat.edu
J. Sankar
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept of Mechanical Engineering, McNair Hall, North Carolina A&T State University, Greensboro, NC 27411, quiming@ncat.edu
A. K. Sharma
Affiliation:
Department of Materials Science and Engineering, Burlington Labs, P. O. Box 7916, North Carolina State University, Raleigh, NC 27695-7916
J. Narayan
Affiliation:
Department of Materials Science and Engineering, Burlington Labs, P. O. Box 7916, North Carolina State University, Raleigh, NC 27695-7916
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Abstract

The internal compressive stress as large as 10 GPa has been the major stumbling block for preparation of relatively thick superhard tetrahedral amorphous carbon (Ta-C) films. We have successfully deposited Ta-C films as thick as 1000 nm by mechanical doping to reduce and alleviate the level of internal compressive stresses. In this paper, we reported the preparation of functionally graded Ta-C coatings by pulsed laser deposition. The thickness of the Ta-C films with significantly improved adhesion was measured to be up to 1500 nm. The concentration of foreign atoms such as silver, copper, silicon and titanium was decreased away from the coating/substrate interface, and the surface layer was pure Ta-C. Nanoindentation measurements were performed on the coatings. Nanohardness as high as 65 GPa and Young‘s modulus as large as 600 GPa were obtained for the functionally graded Ta-C films. Micro-Raman measurements and microstructural analysis by transmission electron microscopy was carried out to acquire information about the bonding environment and atomic structure of the coatings as a function of foreign atoms. The results were discussed in combination with theoretical models associated with the prediction of elastic properties of amorphous carbon networks.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 617: Symposium J – Laser-Solid Interactionsfor Materials Processing , 2000 , J7.7
Copyright
Copyright © Materials Research Society 2000

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References

1 Lifshitz, Y., in The Physics of Diamond, edited by Paoletti, A. and Tucciarone, A., Italian Phy. Soc., 209 (1997).Google Scholar
2 Bozhko, A., Ivanov, A. et al. Diamond and Related Mater. 4,488 (1995).Google Scholar
3 Milne, W. I., J. Non-cryst. Solids 198–200,605 (1996).Google Scholar
4 Robertson, J., Prog. Solid State Chem. 21, 199(1991).Google Scholar
5 Nir, D., Thin Solid Films 146, 27 (1987).Google Scholar
6 Friedmann, T. A., Sullivan, J. P., Knapp, J. A., Tallant, D. R., Follstaedt, D. M., Medlin, D. L. and Mirkarimi, P. B., Appl. Phys. Lett. 71, 3820 (1997).Google Scholar
7 Ferrari, A. C., Kleinsorge, B., Morrison, N. A., Hart, A., Stolojan, V. and Robertson, J., J. Appl. Phys. 85, 7191 (1999).Google Scholar
8 Wei, Q., Narayan, R. J., Sharma, A. K., Sankar, J. and Narayan, J., J. Vac. Sci. Tech. A17, 3406 (1999).Google Scholar
9 Ferrari, A. C., Robertson, J., Beghi, M. G., Bottani, C. E., Ferulano, R. and Pastorelli, R., Appl. Phys. Lett. 75, 1893 (1999).Google Scholar
10 He, H. and Thorpe, M. E., Phys. Rev. Lett. 54, 2107 (1985).Google Scholar
11 Kelires, P. C., Phys. Rev. Lett. 73, 2460 (1994).Google Scholar
12 Wei, Q., Narayan, R. J., Narayan, J., Sankar, J. and Sharma, A. K., Mat. Sci. Eng. B53, 262 (1998).Google Scholar
13 Voevodin, A. A., Capano, M. A., Laube, S. J. P., Donley, M. S. and Zabinski, J. S., Thin Solid Films 298, 107 (1997).Google Scholar
14 Voevodin, A. A. and Zabinski, J. S., Diamond and Related Mat. 7,463 (1998).Google Scholar