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Possible Artefacts in Measurement of Hardness and Elastic Modulus on Superhard Coatings and the Verification of the Correctness of the Data

Published online by Cambridge University Press:  11 February 2011

S. Veprek ,
S. Mukherjee ,
P. Karvankova ,
H.-D. Männling ,
J. L. He ,
J. Xu ,
J. Prochazka ,
A. S. Argon ,
A. S. Li  and
Q. F. Fang
...Show all authors
S. Veprek
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
S. Mukherjee
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
P. Karvankova
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
H.-D. Männling
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
J. L. He
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
J. Xu
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
J. Prochazka
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching b. Munich, Germany
A. S. Argon
Affiliation:
Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
A. S. Li
Affiliation:
Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
Q. F. Fang
Affiliation:
Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
S. Z. Li
Affiliation:
Qingdao University of Chemical Technology, Qingdao 266042, China
M. H. Manghnani
Affiliation:
School of Ocean and Earth Science and Technology, University of Hawaii, Honolulu, Hawaii 96822, USA
S. Tkachev
Affiliation:
School of Ocean and Earth Science and Technology, University of Hawaii, Honolulu, Hawaii 96822, USA
P. Zinin
Affiliation:
School of Ocean and Earth Science and Technology, University of Hawaii, Honolulu, Hawaii 96822, USA
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Abstract

Measurements of the hardness and Young's modulus of superhard coatings (HV≥40 GPa) by means of automated load-depth-sensing indentation technique can be subject to a number of errors that are discussed and exemplified here. Only load-independent values of hardness for loads larger than 30–50 mN can be considered reliable when the technique of Doerner and Nix (linear extrapolation of the unloading curve) is used to determine the corrected indentation depth. The results are compared with values of Vickers hardness calculated from the contact area of the remaining plastic deformation which was measured by means of calibrated scanning electron microscope. The values of Young's modulus obtained from the indentation are close to the zero-pressure shear modulus of the coatings as measured by means of Vibrating Reed and surface Brillouin scattering techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 750: Symposium Y – Surface Engineering 2002–Synthesis, Characterization and Applications , 2002 , Y1.3
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

[1] Meyer, E., Zeitschrift des Vereines Deutscher Ingenieure 52, 645 (1908).Google Scholar
[2] Tabor, G., The Hardness of Metals (Clarendon Press, Oxford, 1951).Google Scholar
[3] Doerner, M. F. and Nix, W. D., J. Mater. Res. 1, 601 (1986).Google Scholar
[4] Oliveran, W: C., Pharr, G. M., J. Mater. Res. 7, 1564 (1992).Google Scholar
[5] Behnke, H.-H., Härterei Zechnische Mitteilungen 48, 2 (1993).Google Scholar
[6] Neumaier, P., Metalloberfläche 2, 41 (1989).Google Scholar
[7] Tsui, T.Y., Oliver, W.C. and Pharr, G.M., MRS Symp. Proc. 436, 147 (1997).Google Scholar
[8] Veprek, S., Haussmann, M. and Reiprich, S., J. Vac. Sci. Technol. A 15, 46 (1996).Google Scholar
[9] Veprek, S., J. Vac. Sci. Technol. A 17, 2401 (1999).Google Scholar
[10] Veprek, S. and Argon, A. S., J. Vac. Sci. Technol. B 20, 650 (2002).Google Scholar
[11] Niederhofer, A., PhD Thesis, Technical University Munich 2001.Google Scholar
[12] He, Jianli and Veprek, Stan, Surf. Coat. Technol. (2002/2003) in press.Google Scholar
[13] Bull, S.J., J. Vac. Sci. Technol. A19, 1404 (2001); Thin Solid Films 398–399, 291 (2001).Google Scholar
[14] Veprek, S. at al., invited paper at Int. Conf. Metall. Coatings & Thin Films. San Diego, April 2002, Thin Solid Films, submitted.Google Scholar
[15] Veprek, S., Niederhofer, A., Moto, K., Nesladek, P., Männling, H. and Bolom, T., MRS Symp. Proc. 581, 321 (2000).Google Scholar
[16] Niederhofer, A., Nesladek, P., Männling, H.-D., Moto, K., Veprek, S. and Jilek, M., Surf. Coating Technol. 120–121, 173 (1999).Google Scholar
[17] Veprek, S., Niederhofer, A., Moto, K., Bolom, T., Männling, H.-D., Nesladek, P., Dollinger, G. and Bergmaier, A., Surf. Coating Technol. 133, 152 (2000).Google Scholar
[18] Niederhofer, A., Bolom, T., Nesladek, P., Moto, K., Eggs, C., Patil, D. S. and Veprek, S., Surf. Coat. Technol. 146–147, 183 (2001).Google Scholar
[19] Männling, H.-D., Patil, D. S., Moto, K., Jilek, M. and Veprek, S., Surf. Coating Technol. 146–147, 263 (2001).Google Scholar
[20] Burnett, P.J., in: Properties of Silicon, INSPEC – EMIS Datareviews Ser. No. 4, The Institution of Electrical Engineers, London 1988, p. 27, ff.Google Scholar
[21] Berg, G. et al., in: Handbook of Ceramic Materials, Vol. 2, ed. Riedel, R., Wiley-VCH, Weinheim 2000, p. 964 ff (Table I).Google Scholar
[22] Zener, C., Elasticity and Anelasticity of Metals, The University of Chicago Press, 2nd ed., Chicago 1952.Google Scholar
[23] Nowick, A. S. and Berry, B. S., Annelastic Relaxation in Crystalline Solids, Academic Press, New York 1972.Google Scholar
[24] Sneddon, I.N., Int. J. Eng. Sci. 3, 47 (1965).Google Scholar
[25] Pharr, G.M., Mater. Sci. & Eng. A 253, 151 (1998).Google Scholar
[26] Cheng, Che-Min and Cheng, Yang-Tse, Appl. Phys. Lett. 71, 2623 (1997).Google Scholar
[27] Li, Z.S., Fang, Q.F., Li, S.Z. and Veprek, S., Mater. Sci. Eng. A, submittedGoogle Scholar
[28] Manghani, M.H., Tkachev, S., Zinin, P., Karvankova, P., Veprek, S. and Glorieoux, C., Int. Conf. Metal. Coatings & Thin Films, San Diego, April 2003, to be published.Google Scholar
[29] Primilan, S., Clark, S., Erdonmenz, C., Alivisatos, P., Patil, D. S., Prochazka, J., Karvankova, P. and Veprek, S., to be publishedGoogle Scholar
[30] Wilks, J. and Wilks, E., Properties and Applications of Diamond, Butterworth-Heinemann, Oxford 1991.Google Scholar