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Plasma Enhanced Metalorganic Chemical Vapor Deposition of Conductive Oxide Electrodes for Ferroelectric BaTiO3 Capacitors

Published online by Cambridge University Press:  21 February 2011

Jiming Zhang ,
Guang-Ji Cui ,
Douglas Gordon ,
Peter Van Buskirk  and
John Steinbeck
Jiming Zhang
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
Guang-Ji Cui
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
Douglas Gordon
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
Peter Van Buskirk
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
John Steinbeck
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
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Abstract

Thin film heterostructures of BaTiO3/YBa2Cu3O7-x (YBCO) and BaTiO3/LaxSrl-xCoO3 (LSCO) have been prepared by a novel single liquid source plasma-enhanced metalorganic chemical vapor deposition (PE-MOCVD) process. Both YBCO and LSCO are conductive oxides with perovskite structure and lattice parameters closely matched to BaTiO3. YBCO films were found to deteriorate after the deposition of BaTiO3 under the PE-MOCVD conditions as revealed by X-ray diffraction and electrical characterization. LSCO thin films prepared by PE-MOCVD have a mirror-like surface, exhibit low electrical resistivity (p = 200 μΩ-cm at room temperature) and are robust to BaTiO3 deposition. These characteristics make LSCO a promising electrode material for ferroelectric capacitors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 249
Copyright
Copyright © Materials Research Society 1993

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