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Piezoelectric Measurements with Atomic Force Microscopy

Published online by Cambridge University Press:  10 February 2011

J. A. Christman ,
H. Maiwa ,
S.-H. Kim ,
A. I. Kingon  and
R. J. Nemanich
J. A. Christman
Affiliation:
Department of Physics and North Carolina State University, Raleigh, NC 27695
H. Maiwa
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
S.-H. Kim
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
A. I. Kingon
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
R. J. Nemanich
Affiliation:
Department of Physics and North Carolina State University, Raleigh, NC 27695
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Abstract

An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode which is driven by an externally applied voltage. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single crystal quartz, thin film ZnO, Pb(Zr,Ti)O3 (Zr/Ti = 30/70), and nonpiezoelectric amorphous SiO2 thin films. The system was also used to measure d33 hysteresis loops for Pb(Zrx,Ti1−x)O3 thin films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 617
Copyright
Copyright © Materials Research Society 1999

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References

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