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Photoluminescence Characteristics of GaN Layers Grown on Soi Substrates and Relation to Material Properties

Published online by Cambridge University Press:  10 February 2011

A. Philippe
Affiliation:
Laboratoire de Physique de la Matière (UMR CNRS 5511)INSA de Lyon Bât 502 -69621 Villeurbanne Cedex, France, bru@insa.insa-lyon.fr
C. Bru-Chevallier
Affiliation:
Laboratoire de Physique de la Matière (UMR CNRS 5511)INSA de Lyon Bât 502 -69621 Villeurbanne Cedex, France, bru@insa.insa-lyon.fr
G. Guillot
Affiliation:
Laboratoire de Physique de la Matière (UMR CNRS 5511)INSA de Lyon Bât 502 -69621 Villeurbanne Cedex, France, bru@insa.insa-lyon.fr
J. Cao
Affiliation:
The University of Michigan, Department of Electrical Engineering & Computer Science, 1301Beal Ave., Ann Arbor, MI 48109-2122, USA, pavlidis@umich.edu
D. Pavlidis
Affiliation:
The University of Michigan, Department of Electrical Engineering & Computer Science, 1301Beal Ave., Ann Arbor, MI 48109-2122, USA, pavlidis@umich.edu
A. Eisenbach
Affiliation:
The University of Michigan, Department of Electrical Engineering & Computer Science, 1301Beal Ave., Ann Arbor, MI 48109-2122, USA, pavlidis@umich.edu
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Abstract

GaN layers were grown by MOCVD on Silicon on Insulator (SOI) substrates in an effort to improve the material quality compared to more traditionally employed sapphire substrates. Their photoluminescence properties are reported and found to exhibit an intense and relatively large PL band around 3.47eV at low temperature (7K). This is about 10meV lower than the PL energy of samples grown on sapphire substrates and suggests the presence of lower strain in the layers which is expected for compliant growth on SOI substrates. The shape of the main PL peak appears to indicate that Silicon diffusion takes place from the substrate during growth. The behavior of the PL spectra is studied as a function of temperature. The GaN films show good overall electrical properties with Hall mobilities at room temperature in the range of 150 to 300cm2/Vs and background carrier concentration from 2.9 to 3.9×1019cm−3.The promising optical and electronic features of these layers could be of great interest for the development of high quality optical and electronic devices.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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References

1. Nakamura, S., Proceedings of the International Conference on Nitride Semiconductors, Tokushima, Japan (1997).Google Scholar
2. Kuramata, A., Proceedings of the International Conference on Nitride Semiconductors, Tokushima, Japan (1997).Google Scholar
3. Pavlidis, D., Singh, J., Park, Y., Eisenbach, A., Cao, J., Office of Naval Research Report (N00014- 92-J-1552), July 1996.Google Scholar
4. Cao, J., Pavlidis, D., Park, Y., Singh, J., Eisenbach, A., 8th Biennial Workshop on Organcmetallic Vapor Phase Epitaxy, Dana Point, CA, April 13 - 17, 1997, Paper#84.Google Scholar
5. Cao, J., Pavlidis, D., Eisenbach, A., Philippe, A., Bru-Chevallier, C., Guillot, G., Appl. Phys. Lett., to be published Dec. 97.Google Scholar
6. Steckl, A.J., Devrajan, J., Tran, C., Strall, R.A., Appl. Phys. Lett. 69, 22642266 (1996)10.1063/1.117528Google Scholar
7. Monemar, B., Phys. Rev. B10, 676681 (1974).10.1103/PhysRevB.10.676Google Scholar
8. Andrianov, A.V., Lacklison, D.E., Orton, J.W., Dewsnip, D.J., Hooper, S.E., Foxon, C.T., Semicond. Sci. Technol. 11, 366371 (1996).10.1088/0268-1242/11/3/015Google Scholar
9. Grandjean, N., Massies, J., Leroux, M., Appl. Phys. Lett. 69, 2071 (1996)10.1063/1.116883Google Scholar
10. Fischer, S., Steude, G., Hofman, D.M., Kurth, F., Anders, F., Topf, M., Meyer, B.K., Bertram, F., Schmidt, M., Christen, J., Eckey, L., Hoist, J., Hoffmann, A., Proceedings of the International Conference on Nitride Semiconductors, Tokushima, Japan (1997).Google Scholar
11. Korona, K.P., Wysmotek, A., Pakula, K., Stepniewski, R., Baranowski, J.M., Grzegory, I., Lucznik, B., Wroblewski, M., Porowski, S., Appl. Phys. Lett. 69, 788790 (1996).10.1063/1.117892Google Scholar
12. See for instance: Tchounkeu, M., Briot, O., Gil, B., Alexis, J.P., Aulombard, R.L., J. Appl. Phys. 80, 53525360 (1996).10.1063/1.363475Google Scholar
13. Gil, B., Briot, O., Aulombard, R.L., Phys. Rev. B 52, 1702817031 (1995).10.1103/PhysRevB.52.R17028Google Scholar
14. Eisenbach, A., Pavlidis, D., Philippe, A., Bru-Chevallier, C., Dubois, C., 24th International Symposium on Compound Semiconductors, Coronado, CA, September 8 - 11, 1997, Paper TuE3.Google Scholar
15. Schubert, E.F., Goepfert, I.D., Grieshaber, W., Redwing, J.M., Appl. Phys. Lett 71, 921923 (1997).10.1063/1.119689Google Scholar