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Photoacoustic Measurement of a-Si:H/a-SiNx:H Superlattice Films
Published online by Cambridge University Press: 26 February 2011
Abstract
Photoacoustic (PAS) and optical transmission spectra were measured on a-Si:H/a-SiNx:H superlattices. The absorption coefficient ∝ in the range 102∼104 cm-1 was obtained by converting the PAS signal to ∝. The enhancement of the PAS peak intensity Qs and the increase in the width of the Urbach edge with decreasing a-Si:H layer thickness are explained as results of quantum size effect in the superlattice structure.
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