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Phase Evolution During Ball Milling of Al In NH3 and Subsequent Annealing

Published online by Cambridge University Press:  10 February 2011

J. I Nikolov ,
J. S. Williams ,
D. J. Llewellyn  and
A. Calka
J. I Nikolov
Affiliation:
Department of Electronic Materials Engineering, RSPhysSE, Australian National University, Canberra, 0200, Australia.
J. S. Williams
Affiliation:
Department of Electronic Materials Engineering, RSPhysSE, Australian National University, Canberra, 0200, Australia.
D. J. Llewellyn
Affiliation:
Department of Electronic Materials Engineering, RSPhysSE, Australian National University, Canberra, 0200, Australia.
A. Calka
Affiliation:
Department of Materials Engineering, University of Wollongong, 2572, Australia.
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Abstract

Phase evolution during ball milling of Al in both N2 and NH3 gas has been compared and the annealing behaviour studied in some detail. X-ray diffraction, differential thermal analysis, combustion analysis and scanning and transmission electron microscopy have been used as analytical techniques. Results have shown that a nitride is not formed in N2 but that Al forms into many small, hollow spheres during milling. In contrast, milling in NH3 results in an amorphous AlxNy(O) phase which transforms into crystalline AIN and A12O3 on annealing to 1000°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 481: Symposium P – Science and Technology of Semiconductor Surface Preparation , 1997 , 649
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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