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Optical Properties of Amorphous Silicon-Yttrium Films

Published online by Cambridge University Press:  01 February 2011

Shmyryeva Alexandra N.  and
Semikina Tetyana V.
Shmyryeva Alexandra N.
Affiliation:
Faculty of Electronics, National Technical University of Ukraine “KPI”, Prospect Peremogy 37, 03056, Kiev, Ukraine
Semikina Tetyana V.
Affiliation:
Teikyo University of Science and Technology 2525 Yatsusawa, Uenohara-machi, Kitatsuru-gun Yamanashi, 409-0193, Japan e-mail: semikina@edd.ntu-kpi.kiev.ua
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Abstract

This paper presents and discusses the results of measuring IR reflection and ellipsometric parameters, optical microscopy and AFM the mixed phase of amorphous Si:Y films with microcrystalline inclusions. These films were obtained by electron-beam evaporation of siliconyttrium alloys with different Y concentration (5-30 %) at two substrate temperatures (370 and 620 °C).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 862: Symposium A – Amorphous and Nanocrystalline Silicon Science and Technology–2005 , 2005 , A18.7
Copyright
Copyright © Materials Research Society 2005

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