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Optical Applications of Macroporous Silicon

Published online by Cambridge University Press:  17 March 2011

Volker Lehmann
Volker Lehmann*
Affiliation:
Infineon Technologies, Coporate Research, München, Germany
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Abstract

Two promising optical applications of macroporous silicon are presented. Due to the high contrast in dielectric constant between the air filled pores and the silicon walls the porous structure exhibits a photonic band gap for infrared radiation perpendicular to the pore axis. By photolithograpic patterning waveguides and optical cavities can be realized in this two-dimensional photonic crystal. Along the pore axis a short-pass filter characteristic is observed for ultraviolet and visible light. Such macropore filters are of high optical quality and may replace conventional filters in imaging systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 638: Symposium F – Microcrystaline & Nanocrystalline Semiconductors-2000 , 2000 , F8.1.1
Copyright
Copyright © Materials Research Society 2001

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