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On the Unification of Material Strength Testing for MEMS Applications

Published online by Cambridge University Press:  15 March 2011

Kuo-Shen Chen
Kuo-Shen Chen*
Affiliation:
Department of Mechanical Engineering, National Cheng-Kung University Tainan, Taiwan, 70101, ROC
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Abstract

In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.

Keywords

Fracture strengthFailure probabilityMEMSWeibull statistics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B5.8
Copyright
Copyright © Materials Research Society 2002

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