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On the Structure of Metal Silicide:Silicon Interfaces.
Published online by Cambridge University Press: 22 February 2011
Abstract
A new crystallographic theory of interfacial structure is applied to the case of interfaces between NiSi2, CoSi2 and Pd2Si grown epitaxially on Si. In the case of NiSi2 layers grown in parallel orientation it is shown that dislocations with Burgers vectors ¼<111> separate energetically degenerate interfacial domains on {hko} interfaces. Observations, of such defects on (001) interfaces, using transmission electron microscopy, are presented and show detailed agreement with the theory.
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- Copyright © Materials Research Society 1984
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