Hostname: page-component-77c89778f8-9q27g Total loading time: 0 Render date: 2024-07-18T20:34:22.919Z Has data issue: false hasContentIssue false

On The Origin of Laser-Induced Surface Activation of Ceramics

Published online by Cambridge University Press:  15 February 2011

A.J. Pedraza
Affiliation:
University of Tennessee, Department of Materials Science and Engineering, Knoxville, TN 37996-2200, caos@utk.edu
J.W. Park
Affiliation:
University of Tennessee, Department of Materials Science and Engineering, Knoxville, TN 37996-2200, caos@utk.edu
D.H. Lowndes
Affiliation:
Oak Ridge National Laboratory, Solid State Division, Oak Ridge, TN 37831-6056
S. Cao
Affiliation:
University of Tennessee, Department of Materials Science and Engineering, Knoxville, TN 37996-2200, caos@utk.edu
W.R. Allen
Affiliation:
Lockheed Martin Energy Systems, Inc., Y-12 Site, Oak Ridge, TN 37831-8084
Get access

Abstract

The surfaces of Al2O3 and AlN are modified by pulsed-laser irradiation This modification promotes the deposition of copper when the irradiated substrates are immersed in an electroless bath. In this paper the nature of the surface modification is analyzed using results from Auger Emission Spectroscopy (AES) and Cross Sectional Transmission Electron Microscopy (XTEM). During irradiation AlN thermally decomposes leaving a discontinuous metallic film on the surface. A film of Al2O3 is detected at the surface of the irradiated AlN substrate, much thicker when the irradiation is performed in an oxidizing atmosphere than when done in a reducing one. Nanoparticles of metallic aluminum are generated during laser irradiation of Al2O3 in a reducing atmosphere. When the irradiation of Al2O3 is performed in an oxidizing atmosphere, regions containing aluminum or substoichiometric alumina are detected by AES. It is concluded that the presence of metallic aluminum is the main reason why electroless deposition can occur in both AlN and Al2O3. Deposition kinetics are completely consistent with this conclusion. It is very likely that also substoichiometric alumina helps to catalyze the electroless deposition.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Esrom, H., Mat. Res. Soc. Symp., 204, p. 457 (1991).Google Scholar
2 Shafeev, G. A., Adv. Mat. for Opt. and Elect., 2, p. 183 (1993).Google Scholar
3 Shafeev, G. A., Appl. Phys. A 55, p. 387 (1992).Google Scholar
4 Pimenov, S. M., Shafeev, G. A., Laptev, V. A. and Loubnin, E. N., App. Phys. Lett., 64, p. 1935 (1994).Google Scholar
5 Lowndes, D. H., DeSilva, M., Godbole, M. J., Pedraza, A. J. and Geohegan, D. B., MRS Proceedings, 285, 191 (1993).Google Scholar
6 Pedraza, A.J., Park, J. W., DeSilva, M. J., and Lowndes, D. H., Proceedings of the SecondInternational Conference on Laser Ablation, ATP Conf., 288, p. 329 (1994).Google Scholar
7 Pedraza, A. J., Proceedings of the International Conference on Beam Processing of AdvancedMaterials, edited by J. Singh and S. M. Copley, TMS publication 63 (1993).Google Scholar
8 Cao, Siqi, Pedraza, A. J., and Allard, L. F., “Microstructural Changes of Aluminum Nitride After Laser Irradiation and Electroless Copper Deposition”, p. 636 in Proc. of 52nd Ann. Mtg. of the Microscopy Society of America, ed. by G. W. Bailey and A. J. Garratt-Reed, San Francisco Press, San Francisco, CA (1994).Google Scholar
9 Cao, S., Pedraza, A. J., and Allard, L. F., J. Mater. Res. 10, p. 54 (1995).Google Scholar
10 Pedraza, A. J., Park, J. W., Meyer III, H. M., and Braski, D. N., J. Mater. Res., 9, No. 9, pp. 22512257(1994).Google Scholar
11 Kim, K. S., Baitinger, W. E., Amy, J. W., and Winograd, N., J. Elect Spectro and Related Phenom 5, pp. 351367 (1974).Google Scholar
12 Esrom, H., Mat. Res. Soc. Proc, 204, p.457 (1991).Google Scholar
13 Park, Jae-Won, Adhesion Mechanisms of Metallic Thin Films Deposited on Surface Modified Ceramics. Ph. D. Thesis, Univ. of Tenn., Knoxville (1995)Google Scholar
14 DeSilva, Melvin J., Excimer Laser Induced Surface Activation of Ceramics for Electroless Deposition and Enhanced Adhesion. Ph. D. Thesis, Univ. of Tenn., Knoxville (1994).Google Scholar
15 DeSilva, M. J., Pedraza, A. J., and Lowndes, D. H., J. Mater. Res., 9, No. 4. pp. 10191027 (1994).Google Scholar