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On the Formation of Amorphous and Metastable PVD-Coatings

Published online by Cambridge University Press:  21 February 2011

O. Knotek ,
A. Barimani  and
F. Löffler
O. Knotek
Affiliation:
Technical University Aachen, Institut f. Werkstoffkunde B, Templergraben 55, D-5100 Aachen, F.R.G.
A. Barimani
Affiliation:
now: Gühring KG, D-7470 Albstadt, F.R.G.
F. Löffler
Affiliation:
Technical University Aachen, Institut f. Werkstoffkunde B, Templergraben 55, D-5100 Aachen, F.R.G.
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Abstract

By using differing target materials and admitting reactive atmospheres, thin protective coatings having an amorphous and/or metastable character such as sialon, (Ti, Al)N and (Ti, Zr)N are deposited. Phase formation, crystalline structure, morphology and mechanical properties of these films are investigated by X-ray analysis, transmisison electron microscope (TEM), scanning electron microscope, Auger electron spectroscopy (AES) and metallographic measurements. The thermal stability of the coating systems are examined and corrosion and wear test carried out.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 199
Copyright
Copyright © Materials Research Society 1990

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References

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