Hostname: page-component-77c89778f8-5wvtr Total loading time: 0 Render date: 2024-07-18T19:23:46.288Z Has data issue: false hasContentIssue false

Observations of Damage and Transport of Hydrogen in Ion Bombarded Polycrystalline Silicon

Published online by Cambridge University Press:  21 February 2011

D. J. Sharp
Affiliation:
Sandia National Laboratories, P. O. Box 5800, Albuquerque, NM 87185, USA
J. K. G. Panitz
Affiliation:
Sandia National Laboratories, P. O. Box 5800, Albuquerque, NM 87185, USA
C. H. Seager
Affiliation:
Sandia National Laboratories, P. O. Box 5800, Albuquerque, NM 87185, USA
Get access

Abstract

A combination of chemical etching and sheet resistivity measurements showed that intense (1.4 mA/cm2 ) low energy (1400 eV) ion beam hydrogenation of polycrystalline silicon having a columnar structure can produce electrical defect passivation to depths in the order of 100 μm. Transmission electron micrographs disclose surface and near-surface features resulting from the ion beam bombardment which suggest that one of the hydrogen transport mechanisms may be defect induced.

Type
Research Article
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Ravi, K. V., Serreze, H. B., Bates, H. E., Morrison, A. D., Jewett, D. N., and Ho, J. C. T., EFG Silicon Ribbon Solar Cells, Proc. llth Photovoltaic Specialists Conf., pp. 280–289, (May 1975).Google Scholar
2. Schwuttke, G. H., Ciszek, T. F., and Kran, A., Silicon Ribbon Growth by a Capillary Action Shaping Technique, Annual Rep., ERDA/JPL/954144-77/3, (Oct. 1, 1977).Google Scholar
3. Stepanov, A. V., Growing Crystals of a Predetermined Shape, Izv. Akad. Navk. SSSR, Ser. Fix., Vol.33, pp. 19461953, (1969).Google Scholar
4. Sidensticker, R. G., Scudder, L., and Bradhorst, H. W., Jr., Dendritic Web: a Viable Material for Silicon Solar Cells, IEEE Photovoltaic Specialists Conf., pp. 299–302, (May 1975).Google Scholar
5. Lesk, I. A., Baghdadi, A., Gurtler, R. W., Ellis, R. J., Wise, J. A., and Coleman, M. G.. Ribbon-to-Ribbon Crystal Growth, Proc. 12th IEEE Photovoltaic Specialists Conf., pp. 173–181, (Nov. 1976).Google Scholar
6. Magee, C. W. and Botnick, E. M., Hydrogen Growth Depth Profiling Using SIMX-Problems and Their Solutions, J. Vac. Sci. Technol., 19 (1), (May/June 1981).Google Scholar
7. Leamy, H. J.. in Wells, O. C., Heinrick, K. F. J. and Newbury, D. E. (eds.) Physical Electron Microscopy, Van Nostrand Reinhold, New York, (1981).Google Scholar
8. Seager, C. H., Panitx, J. K. G., and Sharp, D. J., Hydorgen Motion and Bonding in Silicon Grain Boundaries, Presented at the May 8–13, 1983 meet of the Electrochemical Society in San Francisco, abstract #220.Google Scholar
9. Ginley, D. S. and Haaland, D. M., Observation of Grain Boundary Hydrogen in Polycrystalline Silicon with Fourier Transform Infrared Spectroscopy, Appl. Phys. Lett. 39 (3), Aug. 1981.Google Scholar
10. Seager, C. H. and Ginley, D. S., Final report-1979, SERI.Google Scholar
11. West, A. J. and Louthan, M. R., Jr., Dislocation Transport and Hydrogen Embirttlement, Met. Trans. A., Vol.10A, (Nov. 1979).Google Scholar
12. Krishnaswamy, S. V., Messier, R., Ng, Y. S., and Tsong, T. T., Appl. Phys. Lett. 35, 870 (1979).Google Scholar
13. Krishnaswamy, S. V., Messier, R., Ng, Y. S., Tsong, T. T., and McLane, S. B., J. Non-Cryst. Solids, 3536, 531, (1980).Google Scholar
14. Seager, C. H. and Ginley, D. S., Appl. Phys. Lett. 34, 537 (1979).Google Scholar
15. Sarma, R. and Rice, M. J. Jr., The Thermal Expansion Shear Separation (TESS) Technique for Producing Thin Self Supporting Silicon Films for Low-Cost Solar Cells, Trans. Electron Devices, ED–27, pp. 651656, (Nov. 1980).Google Scholar
16. Sharp, D. J., Panitz, J. K. G., and Mattox, D. M., Applications of a Kaufman Ion Source to Low Energy Erosion Studies, J. Vac. Sci. Technol., 16 (6), pp. 18791882, (Nov./Dec. 1979).Google Scholar
17. Kane, P. F. and Larrabee, G. B., Characterization of Semiconductor Materials, (McGraw-Hill, New York, 1980).Google Scholar
18. Gianola, U. F., Damage in Silicon Produced by Bombardment with Helium Ions, J. A. P., Vol.28 (6), p. 871, (Aug. 1957).Google Scholar
19. Seager, C. H., Sharp, D. J., Panitz, J. K. G., and D'Aiello, R. V., Passivation of Grain Boundaries in Silicon, J. Vac. Sci. Technol., 20 (3), p. 430, (Mar. 1982).Google Scholar
20. Seager, C. H., Sharp, D. J., and Panitz, J. K. G., J. Vac. Sci. Technol. 16, 1879 (1979).Google Scholar