Hostname: page-component-68945f75b7-9klrw Total loading time: 0 Render date: 2024-08-06T03:16:48.989Z Has data issue: false hasContentIssue false
  • English
  • Français

Nucleation and Growth of the First Phase in Sputter-Deposited Nb/Al Multilayer Thin Films

Published online by Cambridge University Press:  21 February 2011

K. Barmak ,
S. Vivekanand ,
F. Ma  and
C. Michaelsen
K. Barmak
Affiliation:
Department of Materials and Engineering, Lehigh University, Bethlehem, PA 18015
S. Vivekanand
Affiliation:
Department of Materials and Engineering, Lehigh University, Bethlehem, PA 18015
F. Ma
Affiliation:
Department of Materials and Engineering, Lehigh University, Bethlehem, PA 18015
C. Michaelsen
Affiliation:
Institute of Materials Research, GKSS Research Center, D-21502 Geesthacht, Germany
Get access

Abstract

The formation of the first phase in the reaction of sputter-deposited Nb/Al multilayer thin films has been studied by power-compensated and heat-flux differential scanning calorimetry, x-ray diffraction and transmission electron microscopy. The modulation periods of the films are in the range of 10-500 nm. Both types of calorimetrie measurements, performed at a constant heating rate, show the presence of two peaks (A and B) for the formation of the single product phase, NbAl3. Isothermal calorimetrie scans show that peak A is associated with a nucleation and growth type transformation. The formation of NbAl3 is thus interpreted as a two-stage process of nucleation and lateral growth to coalescence (peak A) followed by normal growth until the consumption of one or both reactants (peak B). Transmission electron microscopy investigations of samples annealed into the first stage of NbAl3 formation show the presence of this phase at the Nb/Al interface and its preferential growth along the grain boundaries of the Al layer. The latter highlights the role of reactant phase grain structure in product phase formation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 398: Symposium C – Thermodynamics and Kinetics of Phase Transformations , 1995 , 257
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Barmak, K., Coffey, K.R., Rudman, D.A., Foner, S., J. Appl. Phys. 67, 7313 (1990) and references therein.Google Scholar
2 Coffey, K.R., Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge (1989).Google Scholar
3 Kissinger, H.E., J. Res. Nat. Bur. Std. 57, 217 (1956).Google Scholar
4 Boswell, P.G., J. Thermal Anal. 18, 353 (1980).Google Scholar
5 Christian, J. W., The Theory of Transformations in Metals and Alloys, Part I: Equilibrium and General Kinetic Theory, 2nd ed. (Pergamon, Oxford, 1975).Google Scholar
6 Coffey, K. R., Clevenger, L. A., Barmak, K., Rudman, D. A. and Thompson, C. V., Appl. Phys. Lett. 55, 852 (1989).Google Scholar