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A Novel Technology to Create Monolithic Instruments for Micro Total Analysis Systems

Published online by Cambridge University Press:  01 February 2011

Konstantin Seibel ,
Lars Schöler ,
Marcus Walder ,
Heiko Schäfer ,
André Schäfer ,
Tobias Pletzer ,
René Püschl ,
Michael Waidelich ,
Heiko Ihmels  and
Dietmar Ehrhardt
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Konstantin Seibel
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Lars Schöler
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Marcus Walder
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Heiko Schäfer
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
André Schäfer
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Tobias Pletzer
Affiliation:
now with Institute of Semiconductor Electronics, RWTH Aachen, D-52074 Aachen, Germany
René Püschl
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Michael Waidelich
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Heiko Ihmels
Affiliation:
now with Institute of Semiconductor Electronics, RWTH Aachen, D-52074 Aachen, Germany
Dietmar Ehrhardt
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
Markus Böhm
Affiliation:
Research Center for Micro- and Nanochemistry and Engineering (Cμ)University of Siegen, D-57068 Siegen, Germany
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Abstract

The feasibility of micro total analysis systems (μTAS) on microchips based on the concept of a monolithic instrument is demonstrated. In such a device a microfluidic layer system is deposited in a backend process on a conventional CMOS integrated circuit with the aim to achieve cost and performance enhancements through integration and miniaturization. Experimental results on elementary functional components of a μTAS are presented including a narrow channel electroosmotic micropump, a micro mass flow meter using the thermal anemometric principle, a micro cytometer with integrated optical detection, and elementary structures for on-chip micro-capillary electrophoresis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 869: Symposium D – Materials, Integration and Technology for Monolithic Instruments , 2005 , D3.8
Copyright
Copyright © Materials Research Society 2005

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