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Non-lithographic Patterning of Oxide-Embedded Silicon Nanoparticles

Published online by Cambridge University Press:  01 June 2011

José R. Rodríguez Núñez ,
Melanie Johnson  and
Jonathan G. C. Veinot
José R. Rodríguez Núñez
Affiliation:
Department of Chemistry, 11227 Saskatchewan Drive, University of Alberta, Edmonton, Alberta, T6G 2G2, Canada.
Melanie Johnson
Affiliation:
Department of Chemistry, 11227 Saskatchewan Drive, University of Alberta, Edmonton, Alberta, T6G 2G2, Canada.
Jonathan G. C. Veinot
Affiliation:
Department of Chemistry, 11227 Saskatchewan Drive, University of Alberta, Edmonton, Alberta, T6G 2G2, Canada.
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Abstract

Oxide-embedded Silicon nanoparticles (OE-Si-NPs) are of great interest for many applications due to unique size effects observed when their size drops below 5 nm (Silicon’s Bohr exciton radius). Some of the suggested applications require patterning of the nanoparticles in an ordered array. Lithographic methods to pattern Si-NPs are common in the literature, however these methods can be costly, and are not time-efficient. Recently, non-lithographic patterning techniques have become very attractive because they are cost-effective and straightforward. In this proceeding we will demonstrate non-lithographic patterning of OE-Si-NPs characterized via AFM and XPS.

Keywords

Sinanoscalepolymer
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1359: Symposium NN – Electronic Organic and Inorganic Hybrid Nanomaterials—Synthesis, Device Physics and Their Applications , 2011 , mrss11-1359-nn10-03
Copyright
Copyright © Materials Research Society 2011

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References

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