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Nondestructive Measurement of Interphase Processes Using Impedance Spectroscopy

Published online by Cambridge University Press:  25 February 2011

Richard Frankovic ,
Philip R. Troyk  and
James E. Anderson
Richard Frankovic
Affiliation:
Pritzker Institute of Medical Engineering, Illinois Institute of Technology, Chicago, IL 60616
Philip R. Troyk
Affiliation:
Pritzker Institute of Medical Engineering, Illinois Institute of Technology, Chicago, IL 60616
James E. Anderson
Affiliation:
Research Staff, Ford Motor Company, Dearborn, MI 48121
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Abstract

Impedance spectroscopy (IS) was used as a nondestructive technique to measure the interphase processes of encapsulated microelectronic substrates exposed to high relative humidity. The advantages of IS include: sensitivity of IS to chemical kinetics, ability of in-situ testing of encapsulated packages and non-destructive nature.

Samples undergoing contamination under high relative humidity, produce frequency responses resembling those found for electrochemical cells. This suggests that the presence of hygroscopic residues induce surface water uptake resulting in the formation of surface electrochemical cells and decreased interphase impedance.

Samples undergoing a process of “supercleaning” using argon plasma and exposed to high relative humidity, produce frequency responses that more closely approach responses characteristic of dry samples than do conventionally cleaned or contaminated samples.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 203: Symposium D – Electronic Packaging Materials Science V , 1990 , 189
Copyright
Copyright © Materials Research Society 1991

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